Invention Grant
- Patent Title: Device fabrication
- Patent Title (中): 器件制造
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Application No.: US13665603Application Date: 2012-10-31
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Publication No.: US08569160B2Publication Date: 2013-10-29
- Inventor: Darrell Rinerson , Robin Cheung
- Applicant: Darrell Rinerson , Robin Cheung
- Applicant Address: US CA Sunnyvale
- Assignee: Unity Semiconductor Corporation
- Current Assignee: Unity Semiconductor Corporation
- Current Assignee Address: US CA Sunnyvale
- Agency: Stolowitz Ford Cowger LLP
- Main IPC: H01L21/768
- IPC: H01L21/768

Abstract:
Device fabrication is disclosed, including forming a first part of a device at a first fabrication facility as part of a front-end-of-the-line (FEOL) process, the first part of the device comprising a base wafer formed by FEOL processing, and subsequently performing one or more back-end-of-the-line (BEOL) processes at a second fabrication facility to form an IC, the one or more BEOL processes comprising finishing the forming of the device (e.g., an IC including memory) by depositing one or more memory layers on the base wafer. FEOL processing can be used to form active circuitry die (e.g., CMOS circuitry on a Si wafer) and BEOL processing can be used to form on top of each active circuitry die, one or more layers of cross-point memory arrays formed by thin film processing technologies that may or may not be compatible with or identical to some or all of the FEOL processes.
Public/Granted literature
- US20130059436A1 DEVICE FABRICATION Public/Granted day:2013-03-07
Information query
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