Invention Grant
- Patent Title: Optical system polarizer calibration
- Patent Title (中): 光学系统偏光镜校准
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Application No.: US13164130Application Date: 2011-06-20
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Publication No.: US08570514B2Publication Date: 2013-10-29
- Inventor: Johannes D. de Veer , Leonid Poslavsky , Guorong V. Zhuang , Shankar Krishnan
- Applicant: Johannes D. de Veer , Leonid Poslavsky , Guorong V. Zhuang , Shankar Krishnan
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Luedeka Neely Group, P.C.
- Agent Rick Barnes
- Main IPC: G01J4/00
- IPC: G01J4/00

Abstract:
A method to calibrate a polarizer in polarized optical system at any angle of incidence, by decoupling the calibration from a polarization effect of the system, by providing a calibration apparatus that includes a substrate having a polarizer disposed on a surface thereof, with an indicator on the substrate for indicating a polarization orientation of the polarizer, loading the calibration apparatus in the polarized optical system with the indicator in a desired position, determining an initial angle between the polarization orientation and a reference of the polarized optical system, acquiring spectra using the polarized optical system at a plurality of known angles between the polarization orientation and the reference of the polarized optical system, using the spectra to plot a curve indicating an angle of the polarizer in the polarized optical system, and when the angle of the polarizer is outside of a desired range, adjusting the angle of the polarizer, and repeating the steps of acquiring the spectra, and plotting a curve indicating the angle of the polarizer.
Public/Granted literature
- US20120320377A1 Optical System Polarizer Calibration Public/Granted day:2012-12-20
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