A surface analyzer with which users only need to perform simple operations to quantitatively compare different physical quantities, such as the altitude and phase, in a region of interest on a sample is provided. A three-dimensional color image created by mapping color information corresponding to the phase onto a three-dimensional image created from two-dimensional distribution data of a sample's altitude is displayed in an analysis result display screen. A section image is superposed on the three-dimensional color image. The one-dimensional area at which the section image intersects the sample is defined as the region of interest. The altitude and phase along this region of interest are graphically shown on the graph display area. Various characteristic values at the position of these cursors, such as the altitude and phase values or the difference in these values between two cursors, are displayed in a characteristic value table.