公开(公告)号：US20120070039A1

公开(公告)日：2012-03-22

申请号：US13232835

申请日：2011-09-14

申请人： Takashi MORIMOTO ,  Akinori KOGURE

发明人： Takashi MORIMOTO ,  Akinori KOGURE

IPC分类号： G06K9/00

CPC分类号： G01Q30/04 ,  H01J37/26 ,  H01J2237/221

摘要： A surface analyzer with which users only need to perform simple operations to quantitatively compare different physical quantities, such as the altitude and phase, in a region of interest on a sample is provided. A three-dimensional color image created by mapping color information corresponding to the phase onto a three-dimensional image created from two-dimensional distribution data of a sample's altitude is displayed in an analysis result display screen. A section image is superposed on the three-dimensional color image. The one-dimensional area at which the section image intersects the sample is defined as the region of interest. The altitude and phase along this region of interest are graphically shown on the graph display area. Various characteristic values at the position of these cursors, such as the altitude and phase values or the difference in these values between two cursors, are displayed in a characteristic value table.

摘要翻译： 提供了一种表面分析器，用户只需要执行简单的操作即可定量比较样品中感兴趣区域中的不同物理量，如高度和相位。 通过将对应于相位的颜色信息映射到由样本的高度的二维分布数据创建的三维图像上而形成的三维彩色图像显示在分析结果显示画面中。 剖面图像叠加在三维彩色图像上。 截面图像与样本相交的一维区域被定义为感兴趣的区域。 沿着该感兴趣区域的高度和相位以图形显示在图形显示区域上。 在特征值表中显示这些光标的位置上的各种特征值，例如高度和相位值，或两个光标之间的这些值的差异。

公开(公告)号：US08571284B2

公开(公告)日：2013-10-29

申请号：US13232835

申请日：2011-09-14

申请人： Takashi Morimoto ,  Akinori Kogure

发明人： Takashi Morimoto ,  Akinori Kogure

IPC分类号： G06K9/00

CPC分类号： G01Q30/04 ,  H01J37/26 ,  H01J2237/221

摘要： A surface analyzer with which users only need to perform simple operations to quantitatively compare different physical quantities, such as the altitude and phase, in a region of interest on a sample is provided. A three-dimensional color image created by mapping color information corresponding to the phase onto a three-dimensional image created from two-dimensional distribution data of a sample's altitude is displayed in an analysis result display screen. A section image is superposed on the three-dimensional color image. The one-dimensional area at which the section image intersects the sample is defined as the region of interest. The altitude and phase along this region of interest are graphically shown on the graph display area. Various characteristic values at the position of these cursors, such as the altitude and phase values or the difference in these values between two cursors, are displayed in a characteristic value table.

摘要翻译： 提供了一种表面分析器，用户只需要执行简单的操作即可定量比较样本中感兴趣区域中的不同物理量，如高度和相位。 通过将对应于相位的颜色信息映射到由样本的高度的二维分布数据创建的三维图像上而形成的三维彩色图像显示在分析结果显示画面中。 剖面图像叠加在三维彩色图像上。 截面图像与样本相交的一维区域被定义为感兴趣的区域。 沿着该感兴趣区域的高度和相位以图形显示在图形显示区域上。 在特征值表中显示这些光标的位置上的各种特征值，例如高度和相位值，或两个光标之间的这些值的差异。