发明授权
US08574958B2 Method for manufacturing a gate-control diode semiconductor memory device
有权
栅极控制二极管半导体存储器件的制造方法
- 专利标题: Method for manufacturing a gate-control diode semiconductor memory device
- 专利标题(中): 栅极控制二极管半导体存储器件的制造方法
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申请号: US13535032申请日: 2012-06-27
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公开(公告)号: US08574958B2公开(公告)日: 2013-11-05
- 发明人: Pengfei Wang , Xiaoyong Liu , Qingqing Sun , Wei Zhang
- 申请人: Pengfei Wang , Xiaoyong Liu , Qingqing Sun , Wei Zhang
- 申请人地址: CN Shanghai
- 专利权人: Fudan University
- 当前专利权人: Fudan University
- 当前专利权人地址: CN Shanghai
- 代理机构: Jenkins, Wilson, Taylor & Hunt, P.A.
- 优先权: CN201210001500 20120105
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
This invention belongs to semiconductor device manufacturing field and discloses a method for manufacturing a gate-control diode semiconductor storage device. When the floating gate voltage is relatively high, the channel under the floating gate is of n type and a simple gate-control pn junction structure is configured; by controlling effective n-type concentration of the ZnO film through back-gate control, inverting the n-type ZnO into p-type through a floating gate and using NiO as a p-type semiconductor, an n-p-n-p doping structure is formed while the quantity of charges in the floating gate determines the device threshold voltage, thus realizing memory functions. This invention features capacity of manufacturing gate-control diode memory devices able to reduce the chip power consumption through advantages of high driving current and small sub-threshold swing. This invention is applicable to semiconductor devices manufacturing based on flexible substrate and flat panel displays and floating gate memories, etc.
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