发明授权
- 专利标题: Non-planar germanium quantum well devices
- 专利标题(中): 非平面锗量子阱器件
-
申请号: US13647952申请日: 2012-10-09
-
公开(公告)号: US08575596B2公开(公告)日: 2013-11-05
- 发明人: Ravi Pillarisetty , Jack T. Kavalieros , Willy Rachmady , Uday Shah , Benjamin Chu-Kung , Marko Radosavljevic , Niloy Mukherjee , Gilbert Dewey , Been Y. Jin , Robert S. Chau
- 申请人: Ravi Pillarisetty , Jack T. Kavalieros , Willy Rachmady , Uday Shah , Benjamin Chu-Kung , Marko Radosavljevic , Niloy Mukherjee , Gilbert Dewey , Been Y. Jin , Robert S. Chau
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Finch & Maloney PLLC
- 主分类号: H01L31/00
- IPC分类号: H01L31/00
摘要:
Techniques are disclosed for forming a non-planar germanium quantum well structure. In particular, the quantum well structure can be implemented with group IV or III-V semiconductor materials and includes a germanium fin structure. In one example case, a non-planar quantum well device is provided, which includes a quantum well structure having a substrate (e.g. SiGe or GaAs buffer on silicon), a IV or III-V material barrier layer (e.g., SiGe or GaAs or AlGaAs), a doping layer (e.g., delta/modulation doped), and an undoped germanium quantum well layer. An undoped germanium fin structure is formed in the quantum well structure, and a top barrier layer deposited over the fin structure. A gate metal can be deposited across the fin structure. Drain/source regions can be formed at respective ends of the fin structure.
公开/授权文献
- US20130032783A1 NON-PLANAR GERMANIUM QUANTUM WELL DEVICES 公开/授权日:2013-02-07
信息查询
IPC分类: