Invention Grant
- Patent Title: Non-planar germanium quantum well devices
- Patent Title (中): 非平面锗量子阱器件
-
Application No.: US13647952Application Date: 2012-10-09
-
Publication No.: US08575596B2Publication Date: 2013-11-05
- Inventor: Ravi Pillarisetty , Jack T. Kavalieros , Willy Rachmady , Uday Shah , Benjamin Chu-Kung , Marko Radosavljevic , Niloy Mukherjee , Gilbert Dewey , Been Y. Jin , Robert S. Chau
- Applicant: Ravi Pillarisetty , Jack T. Kavalieros , Willy Rachmady , Uday Shah , Benjamin Chu-Kung , Marko Radosavljevic , Niloy Mukherjee , Gilbert Dewey , Been Y. Jin , Robert S. Chau
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Finch & Maloney PLLC
- Main IPC: H01L31/00
- IPC: H01L31/00

Abstract:
Techniques are disclosed for forming a non-planar germanium quantum well structure. In particular, the quantum well structure can be implemented with group IV or III-V semiconductor materials and includes a germanium fin structure. In one example case, a non-planar quantum well device is provided, which includes a quantum well structure having a substrate (e.g. SiGe or GaAs buffer on silicon), a IV or III-V material barrier layer (e.g., SiGe or GaAs or AlGaAs), a doping layer (e.g., delta/modulation doped), and an undoped germanium quantum well layer. An undoped germanium fin structure is formed in the quantum well structure, and a top barrier layer deposited over the fin structure. A gate metal can be deposited across the fin structure. Drain/source regions can be formed at respective ends of the fin structure.
Public/Granted literature
- US20130032783A1 NON-PLANAR GERMANIUM QUANTUM WELL DEVICES Public/Granted day:2013-02-07
Information query
IPC分类: