Invention Grant
- Patent Title: Lateral-diffusion metal-oxide semiconductor device
- Patent Title (中): 横向扩散金属氧化物半导体器件
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Application No.: US12730245Application Date: 2010-03-24
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Publication No.: US08575691B2Publication Date: 2013-11-05
- Inventor: Tseng-Hsun Liu , Chiu-Ling Lee , Zheng-Hong Chen , Yi-Ming Wang , Ching-Ming Lee
- Applicant: Tseng-Hsun Liu , Chiu-Ling Lee , Zheng-Hong Chen , Yi-Ming Wang , Ching-Ming Lee
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
A method for fabricating a lateral-diffusion metal-oxide semiconductor (LDMOS) device is disclosed. The method includes the steps of: providing a semiconductor substrate; forming a first region and a second region both having a first conductive type in the semiconductor substrate, wherein the first region not contacting the second region; and performing a thermal process to diffuse the dopants within the first region and the second region into the semiconductor substrate to form a deep well, wherein the doping concentration of the deep well is less than the doping concentration of the first region and the second region.
Public/Granted literature
- US20110233673A1 LATERAL-DIFFUSION METAL-OXIDE SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2011-09-29
Information query
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