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US08575691B2 Lateral-diffusion metal-oxide semiconductor device 有权
横向扩散金属氧化物半导体器件

Lateral-diffusion metal-oxide semiconductor device
Abstract:
A method for fabricating a lateral-diffusion metal-oxide semiconductor (LDMOS) device is disclosed. The method includes the steps of: providing a semiconductor substrate; forming a first region and a second region both having a first conductive type in the semiconductor substrate, wherein the first region not contacting the second region; and performing a thermal process to diffuse the dopants within the first region and the second region into the semiconductor substrate to form a deep well, wherein the doping concentration of the deep well is less than the doping concentration of the first region and the second region.
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