发明授权
- 专利标题: Surface acoustic wave element
- 专利标题(中): 表面声波元件
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申请号: US13219739申请日: 2011-08-29
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公开(公告)号: US08575818B2公开(公告)日: 2013-11-05
- 发明人: Hisashi Yamazaki , Hideaki Takahashi , Taku Kikuchi
- 申请人: Hisashi Yamazaki , Hideaki Takahashi , Taku Kikuchi
- 申请人地址: JP Kyoto
- 专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人地址: JP Kyoto
- 代理机构: Keating & Bennett, LLP
- 优先权: JP2009-051039 20090304; JP2009-284179 20091215
- 主分类号: H01L41/08
- IPC分类号: H01L41/08 ; H03H9/00
摘要:
A surface acoustic wave element has a small energy loss and when it is used in a filter device, suppresses a spurious component occurring near the resonant frequency of a principal response and improves the frequency characteristic near the pass band of the filter device. The surface acoustic wave element includes a piezoelectric substrate, a comb-shaped electrode, and an insulating film. The comb-shaped electrode is disposed on the piezoelectric substrate. The insulating film is disposed so as to cover the piezoelectric substrate and the comb-shaped electrode. Where λ is the wavelength of an elastic wave that propagates in the piezoelectric substrate and h is the difference between the maximum and minimum values of a thickness dimension from the top surface of the piezoelectric substrate to the top surface of the insulating film, 0.01≦h/λ≦0.03 is satisfied.
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