Fluoroalkylsilane-treated metal oxide particles and a fluoroelastomeric binder are dispersed in a fluorinated solvent with a low boiling point and applied to a substrate via spray deposition. The spray deposition process rapidly produces a conformal coating that features low surface energy and surface topography with a large range of characteristic length scales and re-entrant curvature, thereby imparting superoleophobicity. The degree of superoleophobicity is readily adjusted by means of altering the ratio of particles to binder. The choice of particle and binder result in coatings with thermal stability for thousands of hours at temperatures up to 200 degrees Celsius as well as desirable mechanical characteristics.