发明授权
- 专利标题： Ultrasonic probe and manufacturing method thereof
- 专利标题（中）： 超声波探头及其制造方法
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申请号： US13273362申请日： 2011-10-14
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公开(公告)号： US08581472B2公开(公告)日： 2013-11-12
- 发明人: Yasunobu Hasegawa
- 申请人： Yasunobu Hasegawa
- 申请人地址： JP Tokyo
- 专利权人： Nihon Dempa Kogyo Co., Ltd.
- 当前专利权人： Nihon Dempa Kogyo Co., Ltd.
- 当前专利权人地址： JP Tokyo
- 代理机构： Edwards Wildman Palmer LLP
- 代理商 Scott D. Wofsy; Christopher J. Capelli
- 优先权： JP2010-240339 20101027; JP2011-207200 20110922
- 主分类号： H01L41/08
- IPC分类号： H01L41/08
摘要：
A manufacturing method of an ultrasonic probe that has a signal foil made of a copper foil patterned by an additive method is provided. The manufacturing method includes preparing a base material and forming an insulating layer on a surface of the material, patterning the insulating layer by exposure, development, and peeling according to a lithographic technique, forming a cavity reaching an upper surface of the base material in the insulating layer along the patterning, forming a signal foil by performing plating in the cavity in the order of copper plating and solder plating, and demolding the formed signal foil from the cavity.
公开/授权文献
- US20120112604A1 ULTRASONIC PROBE AND MANUFACTURING METHOD THEREOF 公开/授权日：2012-05-10
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