发明授权
- 专利标题: Vibrator element, vibrator, oscillator, and electronic apparatus
- 专利标题(中): 振动元件,振动器,振荡器和电子设备
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申请号: US13363475申请日: 2012-02-01
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公开(公告)号: US08581669B2公开(公告)日: 2013-11-12
- 发明人: Takeo Funakawa , Takashi Yamazaki
- 申请人: Takeo Funakawa , Takashi Yamazaki
- 申请人地址: JP
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: JP2011-020413 20110202; JP2011-199121 20110913
- 主分类号: H01L41/22
- IPC分类号: H01L41/22
摘要:
A vibrator element includes a base section, vibration arms, and excitation electrodes provided to the respective vibration arms, the excitation electrodes each include a first electrode disposed on a principal surface side of the vibration arm, a second electrode disposed so as to be opposed to the first electrode, and a piezoelectric body extending between the first electrode and the second electrode, and ITO is used as at least one of the first electrode and the second electrode.
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