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公开(公告)号：US08191216B2
公开(公告)日：2012-06-05
申请号：US12349201
申请日：2009-01-06
CPC分类号： H03H9/1021 , H03H3/04 , H03H9/21 , Y10T29/42 , Y10T29/49005 , Y10T29/49155 , Y10T29/49574
摘要： A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.
摘要翻译： 振动片制造方法包括：（a）制备具有第一和第二表面的支撑体，所述第一和第二表面在朝向相反方向限定厚度的同时，所述支撑体包括基部和多个臂，所述臂延伸 在与基板的厚度方向正交的方向上并排配置，下电极膜设置在各臂的第一面上，压电膜设置在下电极膜上，至少一个上 电极膜设置在压电膜上，每个臂的第二表面的至少一部分是暴露区域; 和（b）蚀刻第二表面的暴露区域以便减小厚度以降低臂相对于厚度方向的抗弯刚度。
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公开(公告)号：US08581669B2
公开(公告)日：2013-11-12
申请号：US13363475
申请日：2012-02-01
申请人： Takeo Funakawa , Takashi Yamazaki
发明人： Takeo Funakawa , Takashi Yamazaki
IPC分类号： H01L41/22
CPC分类号： H03H9/215 , H03H9/0547 , H03H9/1021
摘要： A vibrator element includes a base section, vibration arms, and excitation electrodes provided to the respective vibration arms, the excitation electrodes each include a first electrode disposed on a principal surface side of the vibration arm, a second electrode disposed so as to be opposed to the first electrode, and a piezoelectric body extending between the first electrode and the second electrode, and ITO is used as at least one of the first electrode and the second electrode.
摘要翻译： 振动元件包括设置在各个振动臂上的基座部分，振动臂和激励电极，激励电极各自包括设置在振动臂主表面侧的第一电极，第二电极设置成与振动臂相对 第一电极和在第一电极和第二电极之间延伸的压电体，并且使用ITO作为第一电极和第二电极中的至少一个。
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公开(公告)号：US20090178260A1
公开(公告)日：2009-07-16
申请号：US12349201
申请日：2009-01-06
IPC分类号： H01L41/22
CPC分类号： H03H9/1021 , H03H3/04 , H03H9/21 , Y10T29/42 , Y10T29/49005 , Y10T29/49155 , Y10T29/49574
摘要： A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.
摘要翻译： 振动片制造方法包括：（a）制备具有第一和第二表面的支撑体，所述第一和第二表面在朝向相反方向限定厚度的同时，所述支撑体包括基部和多个臂，所述臂延伸 在与基板的厚度方向正交的方向上并排配置，下电极膜设置在各臂的第一面上，压电膜设置在下电极膜上，至少一个上 电极膜设置在压电膜上，每个臂的第二表面的至少一部分是暴露区域; 和（b）蚀刻第二表面的暴露区域以便减小厚度以降低臂相对于厚度方向的抗弯刚度。
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公开(公告)号：US08766515B2
公开(公告)日：2014-07-01
申请号：US13125000
申请日：2009-10-22
IPC分类号： H03H9/21
CPC分类号： H03H9/21 , H03H9/0547 , H03H9/1021 , H03H9/19 , H03H9/215
摘要： Deterioration of the Q value caused by the thermoelastic effect is suppressed. Since a first depth of a first groove and a second depth of a second groove are smaller than a distance between a surface including a third surface and a surface including a fourth surface, the first and second grooves do not penetrate between the surface including the third surface and the surface including the fourth surface. In addition, the sum of the first depth of the first groove and the second depth of the second groove is greater than the distance between the third and fourth surfaces, a heat transfer path between a first expandable portion (the first surface) and a second expandable portion (the second surface) cannot be formed as a straight line. As such, the heat transfer path between the first expandable portion (the first surface) and a second expandable portion (the second surface) is made to detour to the first and second grooves and and thus be lengthened.
摘要翻译： 抑制由热弹性效应引起的Q值的劣化。 由于第一凹槽的第一深度和第二凹槽的第二深度小于包括第三表面的表面和包括第四表面的表面之间的距离，所以第一和第二凹槽不会穿过包括第三凹槽的表面 表面和包括第四表面的表面。 此外，第一凹槽的第一深度和第二凹槽的第二深度之和大于第三和第四表面之间的距离，第一可膨胀部分（第一表面）和第二凹槽之间的传热路径 可膨胀部分（第二表面）不能形成为直线。 因此，使第一可膨胀部分（第一表面）和第二可膨胀部分（第二表面）之间的传热路径绕第一和第二槽弯曲并因此被延长。
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公开(公告)号：US08415863B2
公开(公告)日：2013-04-09
申请号：US13460277
申请日：2012-04-30
CPC分类号： H03H9/1021 , H03H3/04 , H03H9/21 , Y10T29/42 , Y10T29/49005 , Y10T29/49155 , Y10T29/49574
摘要： A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.
摘要翻译： 振动片制造方法包括：（a）制备具有第一和第二表面的支撑体，所述第一和第二表面在朝向相反方向限定厚度的同时，所述支撑体包括基部和多个臂，所述臂延伸 在与基板的厚度方向正交的方向上并排配置，下电极膜设置在各臂的第一面上，压电膜设置在下电极膜上，至少一个上 电极膜设置在压电膜上，每个臂的第二表面的至少一部分是暴露区域; 和（b）蚀刻第二表面的暴露区域以便减小厚度以降低臂相对于厚度方向的抗弯刚度。
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公开(公告)号：US20120212109A1
公开(公告)日：2012-08-23
申请号：US13460277
申请日：2012-04-30
IPC分类号： H01L41/04
CPC分类号： H03H9/1021 , H03H3/04 , H03H9/21 , Y10T29/42 , Y10T29/49005 , Y10T29/49155 , Y10T29/49574
摘要： A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.
摘要翻译： 振动片制造方法包括：（a）制备具有第一和第二表面的支撑体，所述第一和第二表面在朝向相反方向限定厚度的同时，所述支撑体包括基部和多个臂，所述臂延伸 在与基板的厚度方向正交的方向上并排配置，下电极膜设置在各臂的第一面上，压电膜设置在下电极膜上，至少一个上 电极膜设置在压电膜上，每个臂的第二表面的至少一部分是暴露区域; 和（b）蚀刻第二表面的暴露区域以便减小厚度以降低臂相对于厚度方向的抗弯刚度。
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公开(公告)号：US20110198969A1
公开(公告)日：2011-08-18
申请号：US13125000
申请日：2009-10-22
IPC分类号： H01L41/04 , H01L41/107
CPC分类号： H03H9/21 , H03H9/0547 , H03H9/1021 , H03H9/19 , H03H9/215
摘要： Deterioration of the Q value caused by the thermoelastic effect is suppressed. Since a first depth of a first groove and a second depth of a second groove are smaller than a distance between a surface including a third surface and a surface including a fourth surface, the first and second grooves do not penetrate between the surface including the third surface and the surface including the fourth surface. In addition, the sum of the first depth of the first groove and the second depth of the second groove is greater than the distance between the third and fourth surfaces, a heat transfer path between a first expandable portion (the first surface) and a second expandable portion (the second surface) cannot be formed as a straight line. As such, the heat transfer path between the first expandable portion (the first surface) and a second expandable portion (the second surface) is made to detour to the first and second grooves and and thus be lengthened.
摘要翻译： 抑制由热弹性效应引起的Q值的劣化。 由于第一凹槽的第一深度和第二凹槽的第二深度小于包括第三表面的表面和包括第四表面的表面之间的距离，所以第一和第二凹槽不会穿过包括第三凹槽 表面和包括第四表面的表面。 此外，第一凹槽的第一深度和第二凹槽的第二深度之和大于第三和第四表面之间的距离，第一可膨胀部分（第一表面）和第二凹槽之间的传热路径 可膨胀部分（第二表面）不能形成为直线。 因此，使第一可膨胀部分（第一表面）和第二可膨胀部分（第二表面）之间的传热路径绕第一和第二槽弯曲并因此被延长。
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公开(公告)号：US08687254B2
公开(公告)日：2014-04-01
申请号：US12628754
申请日：2009-12-01
申请人： Yuki Hanamura , Takeo Funakawa , Tsukasa Funasaka
发明人： Yuki Hanamura , Takeo Funakawa , Tsukasa Funasaka
IPC分类号： G02B26/08
CPC分类号： G02B26/001 , G02B5/284
摘要： An optical filter comprising a first substrate, a first mirror formed on the first substrate, a second substrate coupled to the first substrate, the second substrate including a concave portion, and a second mirror formed on the concave portion and facing the first mirror, wherein the first substrate includes a first portion located on the first mirror, a second portion located around the first portion, a third portion located around the second portion, and a fourth portion located around the third portion, wherein both a thickness of the second portion and a thickness of the fourth portion are equal to or smaller than a thickness of the first portion.
摘要翻译： 一种光学滤波器，包括第一基板，形成在第一基板上的第一反射镜，耦合到第一基板的第二基板，包括凹部的第二基板，以及形成在凹部上并面向第一反射镜的第二反射镜， 所述第一基板包括位于所述第一反射镜上的第一部分，位于所述第一部分周围的第二部分，位于所述第二部分周围的第三部分和位于所述第三部分周围的第四部分，其中所述第二部分的厚度和 第四部分的厚度等于或小于第一部分的厚度。
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公开(公告)号：US07439649B2
公开(公告)日：2008-10-21
申请号：US11820223
申请日：2007-06-18
申请人： Satoshi Fujii , Takeo Funakawa
发明人： Satoshi Fujii , Takeo Funakawa
IPC分类号： H03H9/25
CPC分类号： H03H9/02574 , H03H3/10 , H03H9/02929
摘要： An acoustic wave device capable of exhibiting good characteristics for a prolonged period of time and a method of manufacturing an acoustic wave device are provided. An acoustic wave device of the invention includes a piezoelectric body layer having piezoelectricity and one surface, a pair of electrodes for, when electrified, inducing acoustic vibration in the piezoelectric body layer, the electrodes arranged on the one surface of the piezoelectric body layer, and a silicon dioxide layer provided in contact with the piezoelectric body layer and/or the electrodes, the silicon dioxide layer composed of silicon dioxide as its major component, wherein the silicon dioxide layer is formed by performing sputtering with a silicon dioxide target in an atmosphere of an oxygen flow rate ratio of 60% or more.
摘要翻译： 提供能够长时间显示良好特性的声波装置和制造声波装置的方法。 本发明的声波器件包括：压电体和一个表面的压电体层;一对电极，当电气化时，在压电体层中引起声振动，设置在压电体层的一个表面上的电极; 设置为与压电体层和/或电极接触的二氧化硅层，由二氧化硅作为主要成分构成的二氧化硅层，其中通过在二氧化硅靶的气氛中进行溅射而形成二氧化硅层 氧气流量比为60％以上。
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公开(公告)号：US20070296304A1
公开(公告)日：2007-12-27
申请号：US11820223
申请日：2007-06-18
申请人： Satoshi Fujii , Takeo Funakawa
发明人： Satoshi Fujii , Takeo Funakawa
IPC分类号： H03H9/25
CPC分类号： H03H9/02574 , H03H3/10 , H03H9/02929
摘要： An acoustic wave device capable of exhibiting good characteristics for a prolonged period of time and a method of manufacturing an acoustic wave device are provided. An acoustic wave device of the invention includes a piezoelectric body layer having piezoelectricity and one surface, a pair of electrodes for, when electrified, inducing acoustic vibration in the piezoelectric body layer, the electrodes arranged on the one surface of the piezoelectric body layer, and a silicon dioxide layer provided in contact with the piezoelectric body layer and/or the electrodes, the silicon dioxide layer composed of silicon dioxide as its major component, wherein the silicon dioxide layer is formed by performing sputtering with a silicon dioxide target in an atmosphere of an oxygen flow rate ratio of 60% or more.
摘要翻译： 提供能够长时间显示良好特性的声波装置和制造声波装置的方法。 本发明的声波器件包括：压电体和一个表面的压电体层;一对电极，当电气化时，在压电体层中引起声振动，设置在压电体层的一个表面上的电极; 设置为与压电体层和/或电极接触的二氧化硅层，由二氧化硅作为主要成分构成的二氧化硅层，其中通过在二氧化硅靶的气氛中进行溅射而形成二氧化硅层 氧气流量比为60％以上。
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