Invention Grant
- Patent Title: Temperature measurement apparatus and method
- Patent Title (中): 温度测量装置及方法
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Application No.: US13428870Application Date: 2012-03-23
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Publication No.: US08585284B2Publication Date: 2013-11-19
- Inventor: Jun Abe , Tatsuo Matsudo , Chishio Koshimizu
- Applicant: Jun Abe , Tatsuo Matsudo , Chishio Koshimizu
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2008-059027 20080310
- Main IPC: G01J5/00
- IPC: G01J5/00 ; G01B9/02

Abstract:
A temperature measurement apparatus includes a light source; a first splitter that splits a light beam into a measurement beam and a reference beam; a reference beam reflector that reflects the reference beam; an optical path length adjustor; a second splitter that splits the reflected reference beam into a first reflected reference beam and a second reflected reference beam; a first photodetector that measures an interference between the first reflected reference beam and a reflected measurement beam obtained by the measurement beam reflected from a target object; a second photodetector that measures an intensity of the second reflected reference beam; and a temperature calculation unit. The temperature calculation unit calculates a location of the interference by subtracting an output signal of the second photodetector from an output signal of the first photodetector, and calculates a temperature of the target object from the calculated location of the interference.
Public/Granted literature
- US20120207189A1 TEMPERATURE MEASUREMENT APPARATUS AND METHOD Public/Granted day:2012-08-16
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