发明授权
- 专利标题: Method for testing group III-nitride wafers and group III-nitride wafers with test data
-
申请号: US13728769申请日: 2012-12-27
-
公开(公告)号: US08585822B2公开(公告)日: 2013-11-19
- 发明人: Tadao Hashimoto , Masanori Ikari , Edward Letts
- 申请人: SixPoint Materials, Inc.
- 申请人地址: US CA Buellton
- 专利权人: Sixpoint Materials, Inc.
- 当前专利权人: Sixpoint Materials, Inc.
- 当前专利权人地址: US CA Buellton
- 代理机构: K&L Gates LLP
- 主分类号: C30B23/00
- IPC分类号: C30B23/00 ; C30B25/00 ; C30B28/12 ; C30B28/14
摘要:
The present invention discloses a new testing method of group III-nitride wafers. By utilizing the ammonothermal method, GaN or other Group III-nitride wafers can be obtained by slicing the bulk GaN ingots. Since these wafers originate from the same ingot, these wafers have similar properties/qualities. Therefore, properties of wafers sliced from an ingot can be estimated from measurement data obtained from selected number of wafers sliced from the same ingot or an ingot before slicing. These estimated properties can be used for product certificate of untested wafers. This scheme can reduce a significant amount of time, labor and cost related to quality control.
公开/授权文献
信息查询