Invention Grant
US08586403B2 Process and structures for fabrication of solar cells with laser ablation steps to form contact holes
有权
用激光烧蚀步骤制造太阳能电池以形成接触孔的工艺和结构
- Patent Title: Process and structures for fabrication of solar cells with laser ablation steps to form contact holes
- Patent Title (中): 用激光烧蚀步骤制造太阳能电池以形成接触孔的工艺和结构
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Application No.: US13028059Application Date: 2011-02-15
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Publication No.: US08586403B2Publication Date: 2013-11-19
- Inventor: Gabriel Harley , David D. Smith , Tim Dennis , Ann Waldhauer , Taeseok Kim , Peter John Cousins
- Applicant: Gabriel Harley , David D. Smith , Tim Dennis , Ann Waldhauer , Taeseok Kim , Peter John Cousins
- Applicant Address: US CA San Jose
- Assignee: SunPower Corporation
- Current Assignee: SunPower Corporation
- Current Assignee Address: US CA San Jose
- Agency: Okamoto & Benedicto LLP
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
Contact holes of solar cells are formed by laser ablation to accommodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thicknesses.
Public/Granted literature
- US20120204926A1 PROCESS AND STRUCTURES FOR FABRICATION OF SOLAR CELLS Public/Granted day:2012-08-16
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