发明授权
- 专利标题： Evaporator for organic materials and method for evaporating organic materials
- 专利标题（中）： 有机材料蒸发器及蒸发有机材料的方法
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申请号： US12242323申请日： 2008-09-30
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公开(公告)号： US08591223B2公开(公告)日： 2013-11-26
- 发明人: Stefan Hein , Gerd Hoffmann , Peter Skuk
- 申请人： Stefan Hein , Gerd Hoffmann , Peter Skuk
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson + Sheridan, L.L.P.
- 优先权： EP08165435 20080929
- 主分类号： C23C16/02
- IPC分类号： C23C16/02
摘要：
An evaporator for vaporizing an organic material to be deposited on a flexible substrate where the evaporator includes an evaporation tube having a wall encompassing a cavity for vaporizing the organic material, at least one heating device arranged adjacent to the wall and being adapted to heat the evaporation tube, and at least one nozzle assembly protruding from the evaporation tube. The nozzle assembly further comprises a nozzle cover with an opening, and a shutter for selectively opening and closing the opening of the nozzle cover. The shutter is adapted to have in operation of the evaporation tube a temperature within a shutter temperature range of 140° C. such that the temperature of the nozzle cover is within the shutter temperature range.