发明授权
US08591634B2 Method and equipment for selectively collecting process effluent 有权
选择性收集工艺流出物的方法和设备

Method and equipment for selectively collecting process effluent
摘要:
An apparatus and process for recovering a desired gas such as xenon difluoride, xenon, argon, helium or neon, from the effluent of a chemical process reactor that utilizes such gases alone or in a gas mixture or in a molecule that becomes decomposed wherein the chemical process reactor uses a sequence of different gas composition not all of which contain the desired gas and the desired gas is captured and recovered substantially only during the time the desired gas is in the effluent.
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