Invention Grant
US08591700B2 Susceptor support system 有权
Susceptor支持系统

Susceptor support system
Abstract:
The present disclosure is directed to a susceptor support that includes a hub and a plurality of arms extending radially from the hub, where each arm has a terminal end positioned away from the hub. The susceptor support also includes a plurality of elongated rectangular tips formed at the terminal end of each arm, each tip having a length and a width, wherein the length is greater than the width.
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