Invention Grant
- Patent Title: Susceptor support system
- Patent Title (中): Susceptor支持系统
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Application No.: US12859766Application Date: 2010-08-19
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Publication No.: US08591700B2Publication Date: 2013-11-26
- Inventor: Roy G. Gatchalian , Joseph Gregorio Soriano , Hee Cher Heng
- Applicant: Roy G. Gatchalian , Joseph Gregorio Soriano , Hee Cher Heng
- Applicant Address: SG Singapore
- Assignee: STMicroelectronics Pte Ltd.
- Current Assignee: STMicroelectronics Pte Ltd.
- Current Assignee Address: SG Singapore
- Agency: Seed IP Law Group PLLC
- Main IPC: B05C13/00
- IPC: B05C13/00

Abstract:
The present disclosure is directed to a susceptor support that includes a hub and a plurality of arms extending radially from the hub, where each arm has a terminal end positioned away from the hub. The susceptor support also includes a plurality of elongated rectangular tips formed at the terminal end of each arm, each tip having a length and a width, wherein the length is greater than the width.
Public/Granted literature
- US20120042823A1 SUSCEPTOR SUPPORT SYSTEM Public/Granted day:2012-02-23
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