Invention Grant
- Patent Title: Actuator, stage device, and exposure apparatus
- Patent Title (中): 执行机构,舞台装置和曝光装置
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Application No.: US12926473Application Date: 2010-11-19
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Publication No.: US08593616B2Publication Date: 2013-11-26
- Inventor: Sang Joon Hong , Sang Hyun Park , Sang Don Jang , Oui Serg Kim , Ja Choon Koo , Yong Seok Ihn , Jung Woong Jang , Yoo Chang Kim
- Applicant: Sang Joon Hong , Sang Hyun Park , Sang Don Jang , Oui Serg Kim , Ja Choon Koo , Yong Seok Ihn , Jung Woong Jang , Yoo Chang Kim
- Applicant Address: KR Gyeonggi-Do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2009-0120694 20091207
- Main IPC: B23B5/22
- IPC: B23B5/22 ; G03B27/52 ; G03B27/54

Abstract:
An actuator according to example embodiments may be relatively compact and may be driven with 2 degrees of freedom with less spatial constraints. The actuator may include a base member, a ball screw member including a ball screw coupled to the base member and a ball nut screwed onto the ball screw, a driving member coupled to the ball nut so as to move in conjunction with the ball nut, a first directional displacement member configured to move in a first direction in response to a first movement of the driving member, a wedge member coupled to the driving member so as to be moved in a second direction in response to a second movement of the driving member, a second directional displacement member configured to move in a second direction in conjunction with the wedge member, and a binding member configured to bind the first directional displacement member to at least one of the driving member, the wedge member, and the base member.
Public/Granted literature
- US20110134409A1 Actuator, stage device, and exposure apparatus Public/Granted day:2011-06-09
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