发明授权
- 专利标题： Marker layer to facilitate mask build with interactive layers
- 专利标题（中）： 标记层，以便于使用交互式图层构建面具
-
申请号： US12909034申请日： 2010-10-21
-
公开(公告)号： US08595656B2公开(公告)日： 2013-11-26
- 发明人: Thomas J. Aton , Gregory C. Baldwin , Robert L. Pitts
- 申请人： Thomas J. Aton , Gregory C. Baldwin , Robert L. Pitts
- 申请人地址： US TX Dallas
- 专利权人： Texas Instruments Incorporated
- 当前专利权人： Texas Instruments Incorporated
- 当前专利权人地址： US TX Dallas
- 代理商 Alan A. R. Cooper; W. James Brady III; Frederick J. Telecky, Jr.
- 主分类号： G06F17/50
- IPC分类号： G06F17/50
摘要：
A mask build system includes a program for configuring mask layers and a fabrication site for compiling configured mask layers. The system includes at least one database configured by a system processor, the database comprising drawn layers for fabricating reticles of a semiconductor device; and a marker layer configured to define layer dependent features, the marker layer handed off with that part of the at least one database which will support subsequent layers of the database without altering flow of mask build at the fabrication site.
公开/授权文献
信息查询
