Invention Grant
US08598677B2 Semiconductor device including metal lines 失效
半导体装置包括金属线

  • Patent Title: Semiconductor device including metal lines
  • Patent Title (中): 半导体装置包括金属线
  • Application No.: US12842574
    Application Date: 2010-07-23
  • Publication No.: US08598677B2
    Publication Date: 2013-12-03
  • Inventor: Sang Soo Lee
  • Applicant: Sang Soo Lee
  • Applicant Address: KR Icheon
  • Assignee: Hynix Semiconductor Inc
  • Current Assignee: Hynix Semiconductor Inc
  • Current Assignee Address: KR Icheon
  • Priority: KR10-2010-0002411 20100111
  • Main IPC: H01L21/70
  • IPC: H01L21/70
Semiconductor device including metal lines
Abstract:
Provided are a semiconductor device and a method for manufacturing the same. Since an additional space for forming a shield line is unnecessary, the critical dimension of metal lines is reduced, thereby improving data transfer characteristics, signaling characteristics and noise characteristics of the metal lines. The semiconductor device includes: a plurality of metal lines disposed on the semiconductor device; a plurality of insulation layers disposed on the metal lines; and a plurality of shield lines disposed between the insulation layers.
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