Invention Grant
- Patent Title: Semiconductor device including metal lines
- Patent Title (中): 半导体装置包括金属线
-
Application No.: US12842574Application Date: 2010-07-23
-
Publication No.: US08598677B2Publication Date: 2013-12-03
- Inventor: Sang Soo Lee
- Applicant: Sang Soo Lee
- Applicant Address: KR Icheon
- Assignee: Hynix Semiconductor Inc
- Current Assignee: Hynix Semiconductor Inc
- Current Assignee Address: KR Icheon
- Priority: KR10-2010-0002411 20100111
- Main IPC: H01L21/70
- IPC: H01L21/70

Abstract:
Provided are a semiconductor device and a method for manufacturing the same. Since an additional space for forming a shield line is unnecessary, the critical dimension of metal lines is reduced, thereby improving data transfer characteristics, signaling characteristics and noise characteristics of the metal lines. The semiconductor device includes: a plurality of metal lines disposed on the semiconductor device; a plurality of insulation layers disposed on the metal lines; and a plurality of shield lines disposed between the insulation layers.
Public/Granted literature
- US20110169142A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2011-07-14
Information query
IPC分类: