Invention Grant
- Patent Title: Resolution enhancing technology using phase assignment bridges
-
Application No.: US12697998Application Date: 2010-02-01
-
Publication No.: US08601403B2Publication Date: 2013-12-03
- Inventor: Chih-Hsien Nail Tang
- Applicant: Chih-Hsien Nail Tang
- Applicant Address: US OR Wilsonville
- Assignee: Mentor Graphics Corporation
- Current Assignee: Mentor Graphics Corporation
- Current Assignee Address: US OR Wilsonville
- Agency: Klarquist Sparkman, LLP
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
In one embodiment, a spacing is determined for each edge of a number of features in a photolithographic design. The edges have at least a partially predictable layout. Based on the spacing and the predictable layout, a bridge structure is generated. Each bridge of the bridge structure connects one of the edges to an edge of a neighboring feature. Then, the features and the bridge structure are provided for a phase assignment. The phase assignment assigns features at opposite ends of each bridge in the bridge structure to opposite phases. In another embodiment, a sub-resolution assist feature (SRAF) is introduced for an edge of a feature and a bridge is generated from the feature to the SRAF. Then, the feature and the SRAF are assigned to opposite phases based on the relationship defined by the bridge.
Public/Granted literature
- US20100138806A1 RESOLUTION ENHANCING TECHNOLOGY USING PHASE ASSIGNMENT BRIDGES Public/Granted day:2010-06-03
Information query