发明授权
US08604409B2 Photosensitive detector with composite dielectric gate MOSFET structure and its signal readout method
有权
具有复合介质栅MOSFET结构的感光探测器及其信号读出方法
- 专利标题: Photosensitive detector with composite dielectric gate MOSFET structure and its signal readout method
- 专利标题(中): 具有复合介质栅MOSFET结构的感光探测器及其信号读出方法
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申请号: US13126079申请日: 2010-02-10
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公开(公告)号: US08604409B2公开(公告)日: 2013-12-10
- 发明人: Feng Yan , Rong Zhang , Yi Shi , Lin Pu , Yue Xu , Fuwei Wu , Xiaofeng Bo , Haoguang Xia
- 申请人: Feng Yan , Rong Zhang , Yi Shi , Lin Pu , Yue Xu , Fuwei Wu , Xiaofeng Bo , Haoguang Xia
- 申请人地址: CN Nanjing, Jiangsu CN Nanjing, Jiangsu
- 专利权人: Nanjing University,Feng Yan
- 当前专利权人: Nanjing University,Feng Yan
- 当前专利权人地址: CN Nanjing, Jiangsu CN Nanjing, Jiangsu
- 代理机构: Global IP Services
- 代理商 Tianhua Gu
- 优先权: CN200910024504 20090218; CN200910030729 20090415; CN200910234266 20091118
- 国际申请: PCT/CN2010/070612 WO 20100210
- 国际公布: WO2010/094233 WO 20100826
- 主分类号: H01L31/00
- IPC分类号: H01L31/00
摘要:
The present invention relates to a photosensitive detector with a composite dielectric gate MOSFET structure and its signal readout method. The MOSFET structure detector is formed on a p-type semiconductor substrate. N-type semiconductor regions locate on the two sides of the top part of the p-type semiconductor substrate to form a source and a drain. An underlying dielectric layer, a photo-electron storage layer, a top dielectric layer, and a control gate are stacked on the substrate in sequence. The top insulating dielectric layer can prevent the photoelectrons stored in the photo-electron storage layer from leaking into the control gate. The source and the drain are floating when photoelectrons are collected and injected into the photoelectron storing layer to be held therein. There is a transparent or semi-transparent window for detecting incident light forming on the substrate or gate surface. This invented detector has excellent scalability, basic compatibility with the flash memory fabricating technology, low leakage current, higher imaging speed than CCD, non-sensitivity to processing defects, larger dynamic range than other structures and higher accuracy of signal readout.
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