发明授权
US08604489B2 Mask frame assembly for thin layer deposition and method of manufacturing organic light emitting display device by using the mask frame assembly
有权
用于薄层沉积的面罩框架组件和通过使用面罩框架组件制造有机发光显示装置的方法
- 专利标题： Mask frame assembly for thin layer deposition and method of manufacturing organic light emitting display device by using the mask frame assembly
- 专利标题（中）： 用于薄层沉积的面罩框架组件和通过使用面罩框架组件制造有机发光显示装置的方法
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申请号： US12987360申请日： 2011-01-10
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公开(公告)号： US08604489B2公开(公告)日： 2013-12-10
- 发明人: Jae-Min Hong , Kyung-Han Kim , Ho-Eoun Kim
- 申请人： Jae-Min Hong , Kyung-Han Kim , Ho-Eoun Kim
- 申请人地址： KR Gihheung-Gu, Yongin, Gyeonggi-Do
- 专利权人： Samsung Display Co., Ltd.
- 当前专利权人： Samsung Display Co., Ltd.
- 当前专利权人地址： KR Gihheung-Gu, Yongin, Gyeonggi-Do
- 代理商 Robert E. Bushnell, Esq.
- 优先权： KR10-2010-0002376 20100111
- 主分类号： H01L29/18
- IPC分类号： H01L29/18 ; H01L33/00
摘要：
A mask frame assembly for thin film deposition includes a frame including an opening portion, and a plurality of unit mask strips that are fixed to the frame after a tensile force is applied to both of end portions of the unit mask strips in a lengthwise direction of the unit mask strips. Each of the plurality of unit mask strips includes a plurality of unit masking pattern portions each including a plurality of opening patterns. Before the tensile force is applied to both of the end portions of the unit mask strips in the lengthwise direction and the unit mask strips are fixed to the frame, a width of each of the unit masking pattern portions in a widthwise direction perpendicular to the lengthwise direction increases as a function of a closeness of a portion of the unit masking pattern portion where the width is measured to a central portion of each of the unit masking pattern portions.
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