发明授权
- 专利标题: High breakdown voltage embedded MIM capacitor structure
- 专利标题(中): 高耐压嵌入式MIM电容器结构
-
申请号: US12536819申请日: 2009-08-06
-
公开(公告)号: US08604586B2公开(公告)日: 2013-12-10
- 发明人: Wootag Kang , Jonghae Kim
- 申请人: Wootag Kang , Jonghae Kim
- 申请人地址: US CA San Diego
- 专利权人: QUALCOMM Incorporated
- 当前专利权人: QUALCOMM Incorporated
- 当前专利权人地址: US CA San Diego
- 代理商 Sam Talpalatsky; Nicholas J. Pauley; Joseph Agusta
- 主分类号: H01L27/06
- IPC分类号: H01L27/06
摘要:
Methods and devices related to a plurality of high breakdown voltage embedded capacitors are presented. A semiconductor device may include gate material embedded in an insulator, a plurality of metal contacts, and a plurality of capacitors. The plurality of capacitors may include a lower electrode, a dielectric formed so as to cover a surface of the lower electrode, and an upper electrode formed on the dielectric. Further, the plurality of contacts may connect each of the lower electrodes of the plurality of capacitors to the gate material. The plurality of capacitors may be connected in series via the gate material.
公开/授权文献
- US20110031586A1 High Breakdown Voltage Embedded MIM Capacitor Structure 公开/授权日:2011-02-10
信息查询
IPC分类: