发明授权
- 专利标题: Multi-photon exposure system
- 专利标题(中): 多光子曝光系统
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申请号: US12919060申请日: 2009-02-17
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公开(公告)号: US08605256B2公开(公告)日: 2013-12-10
- 发明人: Robert J. DeVoe , Brian J. Gates , Dean Faklis , Robert T. Krasa , Przemyslaw P. Markowicz , Craig R. Sykora
- 申请人: Robert J. DeVoe , Brian J. Gates , Dean Faklis , Robert T. Krasa , Przemyslaw P. Markowicz , Craig R. Sykora
- 申请人地址: US MN Saint Paul
- 专利权人: 3M Innovative Properties Company
- 当前专利权人: 3M Innovative Properties Company
- 当前专利权人地址: US MN Saint Paul
- 代理商 Daniel J. Iden
- 国际申请: PCT/US2009/034287 WO 20090217
- 国际公布: WO2009/108543 WO 20090903
- 主分类号: G03B27/54
- IPC分类号: G03B27/54 ; G03B27/74
摘要:
An exposure system includes a light source emitting a beam along an optical axis that is capable of inducing a multi-photon reaction in a resin. The exposure system further includes a resin undergoing multiphoton reaction, as well as an automated system including a monitor that measures at least one property of the beam selected from power, pulse length, shape, divergence, or position in a plane normal to the optical axis. The monitor generates at least one signal indicative of the property of the beam, and a sub-system adjusts the beam in response to the signal from the monitor.
公开/授权文献
- US20110001950A1 MULTI-PHOTON EXPOSURE SYSTEM 公开/授权日:2011-01-06
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