发明授权
- 专利标题: Method and apparatus for interferometry
- 专利标题(中): 用于干涉测量的方法和装置
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申请号: US13123546申请日: 2009-10-12
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公开(公告)号: US08605289B2公开(公告)日: 2013-12-10
- 发明人: Klaus Koerner , Wolfgang Osten
- 申请人: Klaus Koerner , Wolfgang Osten
- 申请人地址: DE
- 专利权人: Universitaet Stuttgart
- 当前专利权人: Universitaet Stuttgart
- 当前专利权人地址: DE
- 代理商 Gerald E. Hespos; Michael J. Porco; Matthew T. Hespos
- 优先权: DE102008052003 20081010; DE102008052814 20081014; DE102008062879 20081215
- 国际申请: PCT/EP2009/007327 WO 20091012
- 国际公布: WO2010/040570 WO 20100415
- 主分类号: G01B9/02
- IPC分类号: G01B9/02
摘要:
A method and an arrangement are provided for scalable confocal interferometry for distance measurement, for 3-D detection of an object, for Optical Coherence Tomography (OCT) tomography with an object imaging interferometer and at least one light source. The interferometer has an optical path difference not equal to zero at each optically detected object element. Thus, the maxima of a sinusoidal frequency wavelet, associated with each detected object element, each have a frequency difference Δf_Object. At least one spectrally integrally detecting, rastered detector is arranged to record the object. The light source preferably has a frequency comb, and the frequency comb differences Δf_Source are changed in a predefined manner over time in a scan during measuring. In the process, the frequency differences Δf_Source are made equal to the frequency difference Δf_Object or equal to an integer multiple of the frequency differences Δf_Object at least once for each object element.
公开/授权文献
- US20110235045A1 METHOD AND APPARATUS FOR INTERFEROMETRY 公开/授权日:2011-09-29
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