公开(公告)号：US08934104B2

公开(公告)日：2015-01-13

申请号：US13574707

申请日：2011-01-21

申请人： Klaus Koerner ,  Reinhard Berger ,  Wolfgang Osten

发明人： Klaus Koerner ,  Reinhard Berger ,  Wolfgang Osten

IPC分类号： G01B11/02 ,  G01B9/02

CPC分类号： G01B9/0209 ,  G01B9/02032 ,  G01B9/02061 ,  G01B2290/15

摘要： An arrangement and a method are provided for robust interferometry for detecting distance, depth, profile, form, undulation, flatness deviation and/or roughness or the optical path length in or on technical or biological objects, including in layered form, or else for optical coherence tomography (OCT), with a source of electromagnetic radiation and with an interferometer, in particular also in the form of an interference microscope, having an object beam path and having a reference beam path, in which an end reflector is arranged, and a line-scan detector for detecting electromagnetic radiation in the form of at least one spatial interferogram.

摘要翻译： 提供了用于鲁棒干涉测量的装置和方法，用于检测技术或生物物体中或技术或生物物体上的距离，深度，轮廓，形状，起伏，平坦度偏差和/或粗糙度或光路长度，包括分层形式，或者用于光学 具有电磁辐射源和干涉仪的相干断层摄影（OCT），特别是干涉显微镜的形式，具有物镜光束路径并具有参考光束路径，其中布置有端反射器，以及 行扫描检测器，用于以至少一个空间干涉图的形式检测电磁辐射。

公开(公告)号：US20110235045A1

公开(公告)日：2011-09-29

申请号：US13123546

申请日：2009-10-12

申请人： Klaus Koerner ,  Wolfgang Osten

发明人： Klaus Koerner ,  Wolfgang Osten

IPC分类号： G01J3/45

CPC分类号： G01B9/02004 ,  G01B9/02008 ,  G01B9/02036 ,  G01B9/02042 ,  G01B9/02057 ,  G01B9/02091 ,  G01B2210/50 ,  G01B2290/25 ,  G01B2290/30 ,  G02B21/0056

摘要： A method and an arrangement are provided for scalable confocal interferometry for distance measurement, for 3-D detection of an object, for OC tomography with an object imaging interferometer and at least one light source. The interferometer has an optical path difference not equal to zero at each optically detected object element. Thus, the maxima of a sinusoidal frequency wavelet, associated with each detected object element, each have a frequency difference Δf_Objekt. At least one spectrally integrally detecting, rastered detector is arranged to record the object. The light source preferably has a frequency comb, and the frequency comb differences Δf_Quelle are changed in a predefined manner over time in a scan during measuring. In the process, the frequency differences Δf_Quelle are made equal to the frequency difference Δf_Objekt or equal to an integer multiple of the frequency differences Δf_Objekt at least once for each object element.

摘要翻译： 提供了一种用于距离测量的可缩放共焦干涉测量的方法和装置，用于物体的三维检测，用于物体成像干涉仪和至少一个光源的OC断层摄影。 干涉仪在每个光学检测的物体元件处具有不等于零的光程差。 因此，与每个检测到的对象元素相关联的正弦频率小波的最大值各自具有频率差Dgr; f_Objekt。 至少一个光谱整体检测，被检测器被配置成记录物体。 光源优选地具有频率梳，并且在测量期间的扫描中，频率梳差异和Dgr; f_Quelle以预定的方式随时间改变。 在此过程中，使频率差Dgr; f_Quelle等于频率差Dgr; f_Objekt或者等于每个对象元素至少一次的频率差Dgr; f_Objekt的整数倍。

公开(公告)号：US08605289B2

公开(公告)日：2013-12-10

申请号：US13123546

申请日：2009-10-12

申请人： Klaus Koerner ,  Wolfgang Osten

发明人： Klaus Koerner ,  Wolfgang Osten

IPC分类号： G01B9/02

CPC分类号： G01B9/02004 ,  G01B9/02008 ,  G01B9/02036 ,  G01B9/02042 ,  G01B9/02057 ,  G01B9/02091 ,  G01B2210/50 ,  G01B2290/25 ,  G01B2290/30 ,  G02B21/0056

摘要： A method and an arrangement are provided for scalable confocal interferometry for distance measurement, for 3-D detection of an object, for Optical Coherence Tomography (OCT) tomography with an object imaging interferometer and at least one light source. The interferometer has an optical path difference not equal to zero at each optically detected object element. Thus, the maxima of a sinusoidal frequency wavelet, associated with each detected object element, each have a frequency difference Δf_Object. At least one spectrally integrally detecting, rastered detector is arranged to record the object. The light source preferably has a frequency comb, and the frequency comb differences Δf_Source are changed in a predefined manner over time in a scan during measuring. In the process, the frequency differences Δf_Source are made equal to the frequency difference Δf_Object or equal to an integer multiple of the frequency differences Δf_Object at least once for each object element.

摘要翻译： 提供了一种用于距离测量的可伸缩共焦干涉测量的方法和装置，用于对象的三维检测，用于具有对象成像干涉仪和至少一个光源的光学相干断层扫描（OCT）层析成像。 干涉仪在每个光学检测的物体元件处具有不等于零的光程差。 因此，与每个检测到的对象元素相关联的正弦频率小波的最大值各自具有频差Deltaf_Object。 至少一个光谱整体检测，被检测器被配置成记录物体。 光源优选地具有频率梳，并且频率梳差Deltaf_Source在测量期间在扫描中以预定的方式随时间改变。 在此过程中，使差分Deltaf_Source与频率差Deltaf_Object相等，或等于每个对象元素至少一次频差Deltaf_Object的整数倍。

公开(公告)号：US09175954B2

公开(公告)日：2015-11-03

申请号：US14110100

申请日：2011-12-23

申请人： Klaus Koerner ,  Giancarlo Pedrini ,  Christof Pruss ,  Wolfgang Osten

发明人： Klaus Koerner ,  Giancarlo Pedrini ,  Christof Pruss ,  Wolfgang Osten

IPC分类号： G01B9/021 ,  G01B11/02 ,  G01B11/24 ,  G03H1/04 ,  G03H1/08 ,  G03H1/00

CPC分类号： G01B11/2441 ,  G02F2203/54 ,  G02F2203/56 ,  G03H1/0443 ,  G03H1/0866 ,  G03H2001/0033 ,  G03H2001/045 ,  G03H2001/0467 ,  G03H2210/62 ,  G03H2222/13 ,  G03H2222/22 ,  G03H2222/23 ,  G03H2222/24 ,  G03H2222/33

摘要： The invention relates to a method and arrangement for short coherence holography for distance measurement, for profile detection and/or for 3D detection of one or more object elements and/or object areas and/or objects or for readout of holographic volume memories with a holographic interferometer and with at least one short coherence light source. For each optically detected object element in the hologram the holographic interferometer has an optical path difference clearly unequal to zero. At least one spectrally integrally detecting, rastered detector is arranged. The short coherence light source with frequency comb is designed with the optical delay length Y1. Detected holograms are digitally reconstructed. Relative distances of object elements are digitally calculated from the hologram reconstructions, so that a 3D point cloud of object elements and/or object areas and/or objects is produced. Data can be read out optically in parallelized form from holographic volume memories or three-dimensionally structured signatures.

摘要翻译： 本发明涉及一种用于距离测量的短相干全息术的方法和装置，用于轮廓检测和/或用于一个或多个对象元件和/或物体区域和/或物体的3D检测或用于全息存储的全息体积存储器的读出 干涉仪和至少一个短相干光源。 对于全息图中的每个光学检测的对象元件，全息干涉仪具有明显不等于零的光程差。 至少一个光谱整体检测，被检测器被布置。 具有频率梳的短相干光源设计有光延迟长度Y1。 检测到的全息图经数字重建。 对象元素的相对距离由全息图重建数字计算，从而产生对象元素和/或对象区域和/或对象的3D点云。 数据可以从全息体积存储器或三维结构的签名以光学方式读出。

公开(公告)号：US20120307258A1

公开(公告)日：2012-12-06

申请号：US13574707

申请日：2011-01-21

申请人： Klaus Koerner ,  Reinhard Berger ,  Wolfgang Osten

发明人： Klaus Koerner ,  Reinhard Berger ,  Wolfgang Osten

IPC分类号： G01B11/02 ,  G01B9/02

CPC分类号： G01B9/0209 ,  G01B9/02032 ,  G01B9/02061 ,  G01B2290/15

摘要： An arrangement and a method are provided for robust interferometry for detecting distance, depth, profile, form, undulation, flatness deviation and/or roughness or the optical path length in or on technical or biological objects, including in layered form, or else for optical coherence tomography (OCT), with a source of electromagnetic radiation and with an interferometer, in particular also in the form of an interference microscope, having an object beam path and having a reference beam path, in which an end reflector is arranged, and a line-scan detector for detecting electromagnetic radiation in the form of at least one spatial interferogram.

摘要翻译： 提供了用于鲁棒干涉测量的装置和方法，用于检测技术或生物物体中或技术或生物物体上的距离，深度，轮廓，形状，起伏，平坦度偏差和/或粗糙度或光路长度，包括分层形式，或者用于光学 具有电磁辐射源和干涉仪的相干断层摄影（OCT），特别是干涉显微镜的形式，具有物镜光束路径并具有参考光束路径，其中布置有端反射器，以及 行扫描检测器，用于以至少一个空间干涉图的形式检测电磁辐射。