发明授权
US08605525B2 System and method for testing for defects in a semiconductor memory array
有权
用于测试半导体存储器阵列中的缺陷的系统和方法
- 专利标题: System and method for testing for defects in a semiconductor memory array
- 专利标题(中): 用于测试半导体存储器阵列中的缺陷的系统和方法
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申请号: US12953213申请日: 2010-11-23
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公开(公告)号: US08605525B2公开(公告)日: 2013-12-10
- 发明人: Yin Chin Huang , Chu Pang Huang , Cheng Chi Liu , Min Kuang Li , Chang Chan Yang , Yi Fang Chang
- 申请人: Yin Chin Huang , Chu Pang Huang , Cheng Chi Liu , Min Kuang Li , Chang Chan Yang , Yi Fang Chang
- 申请人地址: TW
- 专利权人: Macronix International Co., Ltd.
- 当前专利权人: Macronix International Co., Ltd.
- 当前专利权人地址: TW
- 代理机构: Baker & McKenzie LLP
- 主分类号: G11C7/00
- IPC分类号: G11C7/00
摘要:
A system and method for testing semiconductor memory devices includes a variable voltage input to a memory cell control gate. The voltage to the control gate can be varied from a voltage level used for normal memory cell operation, such as a read operation, to a voltage level that can be used to detect a defect in the memory device. During testing, the voltage level applied to the control gate is lower than the voltage level applied to a second terminal, such as a drain terminal, of the memory cell. In some embodiments, testing for defects can include applying a negative voltage to the control gate, while a positive voltage is applied to the drain terminal, which can reveal the presence of a gate-to-drain leakage defect.
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