发明授权
- 专利标题: Piezoelectric inkjet printheads and methods for monolithically forming the same
- 专利标题(中): 压电喷墨打印头及其整体成型方法
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申请号: US13191558申请日: 2011-07-27
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公开(公告)号: US08608291B2公开(公告)日: 2013-12-17
- 发明人: Yimin Guan , Eunki Hong
- 申请人: Yimin Guan , Eunki Hong
- 申请人地址: JP Osaka
- 专利权人: Funai Electric Co., Ltd.
- 当前专利权人: Funai Electric Co., Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: Amster, Rothstein & Ebenstein LLP
- 主分类号: B41J2/045
- IPC分类号: B41J2/045
摘要:
A piezoelectric inkjet printhead is monolithically fabricated on a substrate. The printhead includes a plurality of cavities formed into the substrate, piezoelectric actuators disposed over the top of the cavities, a fluidic structure and an ink supply channel. The piezoelectric actuators are formed over the cavities using a sacrificial material which fills the cavities and is removed after the actuators are formed. The fluidic structure defines pressurizing chambers and channels connected to the ink supply channel. The fluidic structure has a plurality of nozzle holes formed on the top surface. The cavities are connected to either a venting channel formed from the backside of the substrate or a venting chamber formed inside the fluidic structures.
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