发明授权
- 专利标题: Temperature measuring apparatus
- 专利标题(中): 温度测量仪
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申请号: US13516916申请日: 2010-12-06
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公开(公告)号: US08608378B2公开(公告)日: 2013-12-17
- 发明人: Hisaki Ishida , Masato Hayashi , Koudai Higashi
- 申请人: Hisaki Ishida , Masato Hayashi , Koudai Higashi
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Nath, Goldberg & Meyer
- 代理商 Jerald L. Meyer; Scott Langford
- 优先权: JP2009-288410 20091218
- 国际申请: PCT/JP2010/071841 WO 20101206
- 国际公布: WO2011/074434 WO 20110623
- 主分类号: G01K7/00
- IPC分类号: G01K7/00
摘要:
Disclosed is a temperature measuring apparatus which is provided with: a substrate (2); a temperature sensor (3) disposed on one surface of the substrate (2); and a wire (8) disposed to electrically connect together a circuit, which detects a temperature using the temperature sensor (3), and the temperature sensor (3). In said surface of the substrate (2), a recessed section (7) having a heat capacity smaller than that of the material of the substrate (2) is formed on the periphery of the temperature sensor (3). The recessed section (7) is formed at a predetermined interval from the temperature sensor (3) such that the recessed section surrounds the temperature sensor (3) and has predetermined width and depth. Preferably, the low heat capacity zone is the recessed section (7), i.e., the groove having a recessed cross-section.
公开/授权文献
- US20120269229A1 TEMPERATURE MEASURING APPARATUS 公开/授权日:2012-10-25