Invention Grant
US08610185B2 Non-uniform gate dielectric charge for pixel sensor cells and methods of manufacturing
有权
用于像素传感器单元的非均匀栅极介电电荷和制造方法
- Patent Title: Non-uniform gate dielectric charge for pixel sensor cells and methods of manufacturing
- Patent Title (中): 用于像素传感器单元的非均匀栅极介电电荷和制造方法
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Application No.: US13736505Application Date: 2013-01-08
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Publication No.: US08610185B2Publication Date: 2013-12-17
- Inventor: Brent A. Anderson , Andres Bryant , William F. Clark, Jr. , John J. Ellis-Monaghan , Edward J. Nowak
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Anthony Canale
- Main IPC: H01L31/062
- IPC: H01L31/062

Abstract:
A non-uniform gate dielectric charge for pixel sensor cells, e.g., CMOS optical imagers, and methods of manufacturing are provided. The method includes forming a gate dielectric on a substrate. The substrate includes a source/drain region and a photo cell collector region. The method further includes forming a non-uniform fixed charge distribution in the gate dielectric. The method further includes forming a gate structure on the gate dielectric.
Public/Granted literature
- US20130119447A1 NON-UNIFORM GATE DIELECTRIC CHARGE FOR PIXEL SENSOR CELLS AND METHODS OF MANUFACTURING Public/Granted day:2013-05-16
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