Invention Grant
US08610203B2 Semiconductor device with buried gates 有权
半导体器件带埋栅

Semiconductor device with buried gates
Abstract:
A method for manufacturing a semiconductor device comprises forming a buried gate after forming an active region to have a line type. The buried gate comprises an operation gate and a non-operation gate. A height of a gate electrode layer (conductive material) of the non-operation gate is formed to be lower than that of a gate electrode layer of the operation gate, thereby increasing a threshold voltage and preventing an overlap of the ion-implanted active region with the non-operation gate. As a result, a Gate Induced Drain Leakage (GIDL) is prevented to improve a refresh characteristic of the semiconductor device.
Public/Granted literature
Information query
Patent Agency Ranking
0/0