Invention Grant
- Patent Title: Semiconductor device with buried gates
- Patent Title (中): 半导体器件带埋栅
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Application No.: US13572136Application Date: 2012-08-10
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Publication No.: US08610203B2Publication Date: 2013-12-17
- Inventor: Kyung Do Kim
- Applicant: Kyung Do Kim
- Applicant Address: KR Icheon
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon
- Priority: KR10-2010-0031807 20100407
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
A method for manufacturing a semiconductor device comprises forming a buried gate after forming an active region to have a line type. The buried gate comprises an operation gate and a non-operation gate. A height of a gate electrode layer (conductive material) of the non-operation gate is formed to be lower than that of a gate electrode layer of the operation gate, thereby increasing a threshold voltage and preventing an overlap of the ion-implanted active region with the non-operation gate. As a result, a Gate Induced Drain Leakage (GIDL) is prevented to improve a refresh characteristic of the semiconductor device.
Public/Granted literature
- US20120306008A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-12-06
Information query
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