Invention Grant
- Patent Title: Electrostatically actuated micro-mechanical switching device
- Patent Title (中): 静电致动微机械开关装置
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Application No.: US13155002Application Date: 2011-06-07
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Publication No.: US08610520B2Publication Date: 2013-12-17
- Inventor: Joerg Froemel , Thomas Gessner , Christian Kaufmann , Stefan Leidich , Markus Nowack , Steffen Kurth , Andreas Bertz , Koichi Ikeda , Akira Akiba
- Applicant: Joerg Froemel , Thomas Gessner , Christian Kaufmann , Stefan Leidich , Markus Nowack , Steffen Kurth , Andreas Bertz , Koichi Ikeda , Akira Akiba
- Applicant Address: DE Munich JP Tokyo
- Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.,Sony Corporation
- Current Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.,Sony Corporation
- Current Assignee Address: DE Munich JP Tokyo
- Agent Laurence A. Greenberg; Werner H. Stemer; Ralph E. Locher
- Priority: EP10401078 20100609
- Main IPC: H01H51/22
- IPC: H01H51/22 ; H01P1/10

Abstract:
An electrostatically actuated micro-mechanical switching device with movable elements formed in the bulk of a substrate for closing and releasing at least one Ohmic contact by a horizontal movement of the movable elements in a plane of the substrate. The switching device has a drive with comb-shaped electrodes including fixed driving electrodes and movable electrodes. A movable push rod is mechanically connected with the movable electrodes, extends through the electrodes, has a movable contact element at one side, and at least one restoring spring. A signal line has two parts interrupted by a gap. The micro-mechanical switching device is in shunt-configuration with low loss, high isolation in a wide frequency range, low switching time at low actuation voltage and sufficient reliability. The line impedance of the signal line and its variation is as small as possible. The switching device is in shunt-configuration for closing and releasing the Ohmic contact between a ground line and the signal line. The contact element has a movable contact beam extending at least partially opposite to the signal line and being electrically and mechanically connected to both parts of the signal line, respectively. The ground line is formed with a contact bar that leads through the gap of the signal line for forming the Ohmic contact between the contact beam and the ground line. A contact metallization is provided at least on top and on the side walls of the contact beam, of the signal line and of the ground line.
Public/Granted literature
- US20110303515A1 ELECTROSTATICALLY ACTUATED MICRO-MECHANICAL SWITCHING DEVICE Public/Granted day:2011-12-15
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