公开(公告)号：US08610520B2

公开(公告)日：2013-12-17

申请号：US13155002

申请日：2011-06-07

申请人： Joerg Froemel ,  Thomas Gessner ,  Christian Kaufmann ,  Stefan Leidich ,  Markus Nowack ,  Steffen Kurth ,  Andreas Bertz ,  Koichi Ikeda ,  Akira Akiba

发明人： Joerg Froemel ,  Thomas Gessner ,  Christian Kaufmann ,  Stefan Leidich ,  Markus Nowack ,  Steffen Kurth ,  Andreas Bertz ,  Koichi Ikeda ,  Akira Akiba

IPC分类号： H01H51/22 ,  H01P1/10

CPC分类号： H01H59/0009 ,  H01H1/20 ,  H01H2001/0078 ,  H01P1/127

摘要： An electrostatically actuated micro-mechanical switching device with movable elements formed in the bulk of a substrate for closing and releasing at least one Ohmic contact by a horizontal movement of the movable elements in a plane of the substrate. The switching device has a drive with comb-shaped electrodes including fixed driving electrodes and movable electrodes. A movable push rod is mechanically connected with the movable electrodes, extends through the electrodes, has a movable contact element at one side, and at least one restoring spring. A signal line has two parts interrupted by a gap. The micro-mechanical switching device is in shunt-configuration with low loss, high isolation in a wide frequency range, low switching time at low actuation voltage and sufficient reliability. The line impedance of the signal line and its variation is as small as possible. The switching device is in shunt-configuration for closing and releasing the Ohmic contact between a ground line and the signal line. The contact element has a movable contact beam extending at least partially opposite to the signal line and being electrically and mechanically connected to both parts of the signal line, respectively. The ground line is formed with a contact bar that leads through the gap of the signal line for forming the Ohmic contact between the contact beam and the ground line. A contact metallization is provided at least on top and on the side walls of the contact beam, of the signal line and of the ground line.

摘要翻译： 一种静电致动的微机械开关装置，其具有形成在基板的主体中的可移动元件，用于通过可移动元件在基板的平面中的水平移动来闭合和释放至少一个欧姆接触。 开关装置具有带有固定驱动电极和可动电极的梳状电极的驱动器。 可移动推杆与可动电极机械连接，延伸穿过电极，在一侧具有可动接触元件，以及至少一个复位弹簧。 信号线有两个部分被间隙中断。 微机械开关器件处于分流配置，具有低损耗，在宽频率范围内的高隔离度，低致动电压下的低开关时间和足够的可靠性。 信号线的线路阻抗及其变化尽可能小。 开关器件处于分流配置，用于闭合和释放接地线与信号线之间的欧姆接触。 接触元件具有至少部分地与信号线相对延伸并且分别电信号和机械地连接到信号线的两个部分的可动接触梁。 接地线形成有接触杆，其通过信号线的间隙，以形成接触梁和接地线之间的欧姆接触。 接触金属化至少在信号线和接地线的接触梁的顶部和侧壁上提供。

公开(公告)号：US08186225B2

公开(公告)日：2012-05-29

申请号：US12301874

申请日：2007-05-09

申请人： Steffen Kurth ,  Dirk Tenholte ,  Karla Hiller ,  Christian Kaufmann ,  Thomas Gessner ,  Wolfram Doetzel

发明人： Steffen Kurth ,  Dirk Tenholte ,  Karla Hiller ,  Christian Kaufmann ,  Thomas Gessner ,  Wolfram Doetzel

IPC分类号： G01L11/00

CPC分类号： G01L21/22

摘要： The invention relates to a sensor element for pressure measurement, having a substrate (5) and at least one mass element (1), which is arranged spaced apart from the substrate (5) and is connected in an oscillating manner to the substrate (5) and/or a support body (6) fixed relative to the substrate (5), so that a gap is formed between the mass element (1) and the substrate (5), the width of which can be varied through oscillations of the mass element (1). At least one recess and/or at least one bushing (4) is located in the surface of the substrate (5) delimiting the gap, which recess is used for reducing the damping of the oscillation of the mass element through the gas or plasma surrounding the mass element (1). The sensor element is used in particular in pressure sensors for measuring pressures in the vacuum range. Through the use of the sensor element according to the invention as a pressure sensor, maximum pressures up to the range of atmospheric air pressure can be recorded. The lowest pressures to be determined are in the range of 10−6 mbar.

摘要翻译： 本发明涉及一种用于压力测量的传感器元件，具有基板（5）和至少一个质量元件（1），其与基板（5）间隔开并且以振荡方式连接到基板（5） ）和/或相对于基板（5）固定的支撑体（6），使得在质量元件（1）和基板（5）之间形成间隙，其宽度可以通过 质量元件（1）。 至少一个凹部和/或至少一个衬套（4）位于限定间隙的衬底（5）的表面中，该凹槽用于减少通过气体或等离子体周围的质量元件的振荡的阻尼 质量元件（1）。 传感器元件特别用于测量真空范围内的压力的压力传感器。 通过使用根据本发明的传感器元件作为压力传感器，可以记录高达大气压力范围的最大压力。 要确定的最低压力在10-6毫巴的范围内。

公开(公告)号：US20100024562A1

公开(公告)日：2010-02-04

申请号：US12301874

申请日：2007-05-09

申请人： Steffen Kurth ,  Dirk Tenholte ,  Karla Hiller ,  Christian Kaufmann ,  Thomas Gessner ,  Wolfram Doetzel

发明人： Steffen Kurth ,  Dirk Tenholte ,  Karla Hiller ,  Christian Kaufmann ,  Thomas Gessner ,  Wolfram Doetzel

IPC分类号： G01L21/22

CPC分类号： G01L21/22

摘要： The invention relates to a sensor element for pressure measurement, having a substrate (5) and at least one mass element (1), which is arranged spaced apart from the substrate (5) and is connected in an oscillating manner to the substrate (5) and/or a support body (6) fixed relative to the substrate (5), so that a gap is formed between the mass element (1) and the substrate (5), the width of which can be varied through oscillations of the mass element (1). At least one recess and/or at least one bushing (4) is located in the surface of the substrate (5) delimiting the gap, which recess is used for reducing the damping of the oscillation of the mass element through the gas or plasma surrounding the mass element (1). The sensor element is used in particular in pressure sensors for measuring pressures in the vacuum range. Through the use of the sensor element according to the invention as a pressure sensor, maximum pressures up to the range of atmospheric air pressure can be recorded. The lowest pressures to be determined are in the range of 10−6 mbar.

摘要翻译： 本发明涉及一种用于压力测量的传感器元件，具有基板（5）和至少一个质量元件（1），其与基板（5）间隔开并且以振荡方式连接到基板（5） ）和/或相对于基板（5）固定的支撑体（6），使得在质量元件（1）和基板（5）之间形成间隙，其宽度可以通过 质量元件（1）。 至少一个凹部和/或至少一个衬套（4）位于限定间隙的衬底（5）的表面中，该凹槽用于减少通过气体或等离子体周围的质量元件的振荡的阻尼 质量元件（1）。 传感器元件特别用于测量真空范围内的压力的压力传感器。 通过使用根据本发明的传感器元件作为压力传感器，可以记录高达大气压力范围的最大压力。 要确定的最低压力在10-6毫巴的范围内。