发明授权
- 专利标题: Method of manufacturing back gate triggered silicon controlled rectifiers
- 专利标题(中): 制造背栅触发硅控整流器的方法
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申请号: US13306488申请日: 2011-11-29
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公开(公告)号: US08614121B2公开(公告)日: 2013-12-24
- 发明人: Robert J. Gauthier, Jr. , Junjun Li
- 申请人: Robert J. Gauthier, Jr. , Junjun Li
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Roberts Mlotkowski Safran & Cole, P.C.
- 代理商 Anthony J. Canale
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Back gate triggered silicon controlled rectifiers (SCR) and methods of manufacture are disclosed. The method includes forming a first diffusion type and a second diffusion type in a semiconductor layer of a silicon on insulator (SOI) substrate. The method further includes forming a back gate of a first diffusion type in a substrate under an insulator layer of the SOI substrate. The method further includes forming raised diffusion regions of a first dopant type and a second dopant type, adjacent to the second diffusion type and the first diffusion type, respectively. The back gate is formed to cover the second diffusion type, the first diffusion type and the second dopant type of the raised diffusion regions.
公开/授权文献
- US20130134477A1 BACK GATE TRIGGERED SILICON CONTROLLED RECTIFIERS 公开/授权日:2013-05-30
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