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US08614609B2 Resonant filter based on an N/MEMS matrix 有权
基于N / MEMS矩阵的谐振滤波器

Resonant filter based on an N/MEMS matrix
Abstract:
A resonant filter including a matrix of n×m resonators of N/MEMS type, each resonator including an actuating mechanism and a detection mechanism. An input of the filter, configured to receive an electrical input signal, is electrically connected to the resonator actuating mechanism. The outputs of the resonator detecting mechanism are electrically connected together and to an output of the filter, such that the signal to be obtained as an output of the filter is an image of the sum of the mechanical responses of the resonators. The resonators are not mechanically coupled together.
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