Invention Grant
US08628674B2 Method for trimming a structure obtained by the assembly of two plates
有权
用于修整通过组装两个板获得的结构的方法
- Patent Title: Method for trimming a structure obtained by the assembly of two plates
- Patent Title (中): 用于修整通过组装两个板获得的结构的方法
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Application No.: US13682009Application Date: 2012-11-20
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Publication No.: US08628674B2Publication Date: 2014-01-14
- Inventor: Marc Zussy , Bernard Aspar , Chrystelle Lagahe-Blanchard , Hubert Moriceau
- Applicant: SOITEC , Commissariat A l'Energie Atomique et Aux Energies Alternatives
- Applicant Address: FR Paris FR Bernin
- Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives,Soitec
- Current Assignee: Commissariat a l'Energie Atomique et aux Energies Alternatives,Soitec
- Current Assignee Address: FR Paris FR Bernin
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0413979 20041228
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
A method for trimming a structure obtained by bonding a first wafer to a second waver on contact faces and thinning the first waver, wherein at least either the first wafer or the second wafer is chamfered and thus exposes the edge of the contact face of the first wafer, wherein the trimming concerns the first wafer. The method includes a) selecting the second wafer from among wafers with a resistance to a chemical etching planned in b) that is sufficient with respect to the first wafer to allow b) to be carried out; b) after bonding the first wafer to the second wafer, chemical etching the edge of the first wafer to form in the first wafer a pedestal resting entirely on the contact face of the second wafer and supporting the remaining of the first wafer; and c) thinning the first wafer until the pedestal is reached and attacked, to provide a thinned part of the first wafer.
Public/Granted literature
- US20130078785A1 METHOD FOR TRIMMING A STRUCTURE OBTAINED BY THE ASSEMBLY OF TWO PLATES Public/Granted day:2013-03-28
Information query
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