发明授权
- 专利标题： Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, and methods for the manufacture thereof
- 专利标题（中）： 压电元件，液体喷射头，液体喷射装置及其制造方法
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申请号： US13225301申请日： 2011-09-02
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公开(公告)号： US08632168B2公开(公告)日： 2014-01-21
- 发明人: Chikara Kojima , Eiju Hirai
- 申请人： Chikara Kojima , Eiju Hirai
- 申请人地址： JP Tokyo
- 专利权人： Seiko Epson Corporation
- 当前专利权人： Seiko Epson Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Kilpatrick Townsend & Stockton LLP
- 优先权： JP2010-199043 20100906
- 主分类号： H01L41/00
- IPC分类号： H01L41/00 ; H02N2/00 ; B41J2/045
摘要：
A piezoelectric element, a liquid ejecting head and a liquid ejecting apparatus that have improved reliability are provided. Methods for the manufacture thereof are also provided. A piezoelectric element includes a vibration plate having a recess in a first surface, a first electrode formed in the recess, a piezoelectric layer formed on the vibration plate and the first electrode, and a second electrode formed on the piezoelectric layer, wherein an upper surface of the first electrode forms a continuous flat surface together with the first surface.
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