发明授权
- 专利标题: Transistors with uniaxial stress channels
- 专利标题(中): 具有单轴应力通道的晶体管
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申请号: US13396872申请日: 2012-02-15
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公开(公告)号: US08633077B2公开(公告)日: 2014-01-21
- 发明人: Ming Cai , Dechao Guo , Liyang Song , Chun-Chen Yeh
- 申请人: Ming Cai , Dechao Guo , Liyang Song , Chun-Chen Yeh
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Cantor Colburn LLP
- 代理商 Vazken Alexanian
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A method for fabricating a transistor with uniaxial stress channels includes depositing an insulating layer onto a substrate, defining bars within the insulating layer, recessing a channel into the substrate, growing a first semiconducting material in the channel, defining a gate stack over the bars and semiconducting material, defining source and drain recesses and embedding a second semiconducting material into the source and drain recesses.
公开/授权文献
- US20130207194A1 TRANSISTORS WITH UNIAXIAL STRESS CHANNELS 公开/授权日:2013-08-15
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