Invention Grant
US08633456B2 Method for centering an optical element in a TEM comprising a contrast enhancing element
有权
在包括对比度增强元件的TEM中对准光学元件的方法
- Patent Title: Method for centering an optical element in a TEM comprising a contrast enhancing element
- Patent Title (中): 在包括对比度增强元件的TEM中对准光学元件的方法
-
Application No.: US13367251Application Date: 2012-02-06
-
Publication No.: US08633456B2Publication Date: 2014-01-21
- Inventor: Bart Buijsse , Peter Christiaan Tiemeijer , Martinus Petrus Maria Bierhoff
- Applicant: Bart Buijsse , Peter Christiaan Tiemeijer , Martinus Petrus Maria Bierhoff
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg; John B. Kelly
- Priority: EP11153513 20110207
- Main IPC: G01J1/00
- IPC: G01J1/00 ; G01N21/00 ; G01N23/00
Abstract:
A method for adjusting or aligning one or more optical elements in a Transmission Electron Microscope (TEM) is disclosed. The TEM is equipped with an objective lens for guiding a beam of electrons to a sample, a diffraction plane in which at least a beam of unscattered electrons is focused and a structure to enhance the Contrast Transfer Function (CTF) which is situated in the diffraction plane or an image thereof.
Public/Granted literature
- US20120199756A1 Method for Centering an Optical Element in a TEM Comprising a Contrast Enhancing Element Public/Granted day:2012-08-09
Information query
