发明授权
- 专利标题: Radio frequency power delivery system
- 专利标题(中): 射频发射系统
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申请号: US12786763申请日: 2010-05-25
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公开(公告)号: US08633782B2公开(公告)日: 2014-01-21
- 发明人: Siddharth P. Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy E. Kalvaitis , William S. McKinney, Jr. , Daniel Goodman , William M. Holber , John A. Smith
- 申请人: Siddharth P. Nagarkatti , Michael Kishinevsky , Ali Shajii , Timothy E. Kalvaitis , William S. McKinney, Jr. , Daniel Goodman , William M. Holber , John A. Smith
- 申请人地址: US MA Andover
- 专利权人: MKS Instruments, Inc.
- 当前专利权人: MKS Instruments, Inc.
- 当前专利权人地址: US MA Andover
- 代理机构: Proskauer Rose LLP
- 主分类号: H03H7/38
- IPC分类号: H03H7/38
摘要:
A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.
公开/授权文献
- US20100231296A1 Radio Frequency Power Delivery System 公开/授权日:2010-09-16
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