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    Radio Frequency Power Delivery System
    1.
    发明申请
    Radio Frequency Power Delivery System 有权
    射频供电系统

    公开(公告)号：US20100231296A1

    公开(公告)日：2010-09-16

    申请号：US12786763

    申请日：2010-05-25

    申请人： Siddharth P. Nagarkatti ,  Michael Kishinevsky ,  Ali Shajii ,  Timothy E. Kalvaitis ,  William S. McKinney, JR. ,  Daniel Goodman ,  William M. Holber ,  John A. Smith

    发明人： Siddharth P. Nagarkatti ,  Michael Kishinevsky ,  Ali Shajii ,  Timothy E. Kalvaitis ,  William S. McKinney, JR. ,  Daniel Goodman ,  William M. Holber ,  John A. Smith

    IPC分类号： H03F1/08

    CPC分类号： H03F1/56 ,  H03F3/191 ,  H03F3/20

    摘要： A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.

    摘要翻译： 提供了一种将功率传递给动态负载的系统和方法。 该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源，用于将DC功率转换为RF功率的功率放大器，用于测量与RF功率相关联的电压和电流矢量之间的电压，电流和相位角的传感器 ，电可控阻抗匹配系统，用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。 该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块，用于确定输送到动态负载的功率的电子匹配系统校准模块，以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。

    Radio frequency power delivery system
    2.
    发明授权
    Radio frequency power delivery system 有权
    射频发射系统

    公开(公告)号：US08633782B2

    公开(公告)日：2014-01-21

    申请号：US12786763

    申请日：2010-05-25

    申请人： Siddharth P. Nagarkatti ,  Michael Kishinevsky ,  Ali Shajii ,  Timothy E. Kalvaitis ,  William S. McKinney, Jr. ,  Daniel Goodman ,  William M. Holber ,  John A. Smith

    发明人： Siddharth P. Nagarkatti ,  Michael Kishinevsky ,  Ali Shajii ,  Timothy E. Kalvaitis ,  William S. McKinney, Jr. ,  Daniel Goodman ,  William M. Holber ,  John A. Smith

    IPC分类号： H03H7/38

    CPC分类号： H03F1/56 ,  H03F3/191 ,  H03F3/20

    摘要： A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.

    摘要翻译： 提供了一种将功率传递给动态负载的系统和方法。 该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源，用于将DC功率转换为RF功率的功率放大器，用于测量与RF功率相关联的电压和电流矢量之间的电压，电流和相位角的传感器 ，电可控阻抗匹配系统，用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。 该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块，用于确定输送到动态负载的功率的电子匹配系统校准模块，以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。

    Radio frequency power delivery system
    3.
    发明授权
    Radio frequency power delivery system 有权
    射频发射系统

    公开(公告)号：US07764140B2

    公开(公告)日：2010-07-27

    申请号：US11554979

    申请日：2006-10-31

    申请人： Siddharth P. Nagarkatti ,  Michael Kishinevsky ,  Ali Shajii ,  Timothy E. Kalvaitis ,  William S. McKinney, Jr. ,  Daniel Goodman ,  William M. Holber ,  John A. Smith ,  Ilya Bystryak

    发明人： Siddharth P. Nagarkatti ,  Michael Kishinevsky ,  Ali Shajii ,  Timothy E. Kalvaitis ,  William S. McKinney, Jr. ,  Daniel Goodman ,  William M. Holber ,  John A. Smith ,  Ilya Bystryak

    IPC分类号： H03H7/38

    CPC分类号： H03F1/56 ,  H03F3/191 ,  H03F3/20

    摘要： A system and method are provided for delivering power to a dynamic load. The system includes a power supply providing DC power having a substantially constant power open loop response, a power amplifier for converting the DC power to RF power, a sensor for measuring voltage, current and phase angle between voltage and current vectors associated with the RF power, an electrically controllable impedance matching system to modify the impedance of the power amplifier to at least a substantially matched impedance of a dynamic load, and a controller for controlling the electrically controllable impedance matching system. The system further includes a sensor calibration measuring module for determining power delivered by the power amplifier, an electronic matching system calibration module for determining power delivered to a dynamic load, and a power dissipation module for calculating power dissipated in the electrically controllable impedance matching system.

    摘要翻译： 提供了一种将功率传递给动态负载的系统和方法。 该系统包括提供具有基本上恒定的功率开环响应的DC电力的电源，用于将DC功率转换为RF功率的功率放大器，用于测量与RF功率相关联的电压和电流矢量之间的电压，电流和相位角的传感器 ，电可控阻抗匹配系统，用于将功率放大器的阻抗修改为动态负载的至少基本匹配的阻抗;以及用于控制电可控阻抗匹配系统的控制器。 该系统还包括用于确定由功率放大器输出的功率的传感器校准测量模块，用于确定输送到动态负载的功率的电子匹配系统校准模块，以及用于计算在电气可控阻抗匹配系统中消耗的功率的功率耗散模块。

    Two phase flow sensor using tomography techniques
    4.
    发明授权
    Two phase flow sensor using tomography techniques 有权
    两相流量传感器采用断层扫描技术

    公开(公告)号：US06857323B1

    公开(公告)日：2005-02-22

    申请号：US10669065

    申请日：2003-09-23

    申请人： Ali Shajii ,  Siddharth P. Nagarkatti ,  John A. Smith

    发明人： Ali Shajii ,  Siddharth P. Nagarkatti ,  John A. Smith

    IPC分类号： G01F1/66 ,  G01F1/74

    CPC分类号： G01F1/74 ,  G01F1/667

    摘要： A method and system is presented for accurately measuring the two phase flow rate of a fluid mixture that includes two different phase components. Capacitance tomography measurements are made in order to determine the concentration ratio of the different phase components within the fluid. Approximate flow measurements are made by transmitting, for example, ultrasound waves through the fluid mixture, and measuring the different speeds of propagation of the ultrasound waves through the different phase components of the fluid mixture. The exact flow rate of the fluid mixture is determined using the concentration ratio obtained from the tomographic measurements, and the approximate flow measurements made, for example, by ultrasound sensing.

    摘要翻译： 提出了一种用于精确测量包括两个不同相分量的流体混合物的两相流速的方法和系统。 进行电容层析成像测量以确定流体内不同相分量的浓度比。 通过传输例如通过流体混合物的超声波以及测量超声波通过流体混合物的不同相分量的不同传播速度来进行近似流量测量。 使用从断层摄影测量获得的浓度比，以及例如通过超声波感测进行的近似流量测量来确定流体混合物的确切流速。

    Pulsed mass flow delivery system and method
    9.
    发明授权
    Pulsed mass flow delivery system and method 有权
    脉冲质量流量输送系统及方法

    公开(公告)号：US07829353B2

    公开(公告)日：2010-11-09

    申请号：US11586782

    申请日：2006-10-26

    申请人： Ali Shajii ,  Siddharth P. Nagarkatti ,  Matthew Mark Besen ,  William R. Clark ,  Daniel Alexander Smith ,  Bora Akgerman

    发明人： Ali Shajii ,  Siddharth P. Nagarkatti ,  Matthew Mark Besen ,  William R. Clark ,  Daniel Alexander Smith ,  Bora Akgerman

    IPC分类号： H01L21/00

    CPC分类号： C23C16/45544 ,  C23C16/45527 ,  C23C16/45557 ,  C23C16/52 ,  Y10S438/935

    摘要： A system for delivering a desired mass of gas, including a chamber, a first valve controlling flow into the chamber, a second valve controlling flow out of the chamber, a pressure transducer connected to the chamber, an input device for providing a desired mass to be delivered, and a controller connected to the valves, the pressure transducer and the input device. The controller is programmed to receive the desired mass from the input device, close the second valve and open the first valve, receive chamber pressure measurements from the pressure transducer, and close the inlet valve when pressure within the chamber reaches a predetermined level. The controller is then programmed to wait a predetermined waiting period to allow the gas inside the chamber to approach a state of equilibrium, then open the outlet valve at time=t0, and close the outlet valve at time=t* when the mass of gas discharged equals the desired mass.

    摘要翻译： 一种用于输送期望质量的气体的系统，包括腔室，控制流入腔室的第一阀门，控制流出腔室的第二阀门，连接到腔室的压力传感器，用于提供期望质量的输入装置 以及连接到阀门，压力传感器和输入装置的控制器。 控制器被编程为从输入装置接收期望的质量，关闭第二阀并打开第一阀，从压力传感器接收室压力测量值，并且当腔室内的压力达到预定水平时关闭入口阀。 然后将控制器编程为等待预定的等待时间，以允许室内的气体达到平衡状态，然后在时间= t0时打开出口阀，并且当气体质量在时间= t *时关闭出口阀 放电等于所需质量。

    Semiconductor manufacturing gas flow divider system and method
    10.
    发明授权
    Semiconductor manufacturing gas flow divider system and method 有权
    半导体制造气体分流器系统及方法

    公开(公告)号：US07072743B2

    公开(公告)日：2006-07-04

    申请号：US10796693

    申请日：2004-03-09

    申请人： Ali Shajii ,  Siddharth P. Nagarkatti

    发明人： Ali Shajii ,  Siddharth P. Nagarkatti

    IPC分类号： G05D7/00 ,  G05D11/00

    CPC分类号： G05D7/0664 ,  C23C16/45561 ,  C23C16/52 ,  Y10T137/0363 ,  Y10T137/2524

    摘要： A system for dividing a single flow into two or more secondary flows of desired ratios, including an inlet adapted to receive the single flow, at least two secondary flow lines connected to the inlet, an input device adapted to receive at least one desired ratio of flow, at least one in-situ process monitor providing measurements of products produced by each of the flows lines, and a controller connected to the input device and the in-situ process monitor. The controller is programmed to receive the desired ratio of flow through the input device, receive the product measurements from the in-situ process monitor, and calculate a corrected ratio of flow based upon the desired ratio of flow and the product measurements. If the product measurements are not equal, then the corrected ratio of flow will be different than the desired ratio of flow.

    摘要翻译： 一种用于将单个流分成两个或更多个期望比例的二次流的系统，包括适于接收单个流的入口，连接到入口的至少两个二次流线，适于接收至少一个期望比例的输入装置 至少一个原位过程监视器，其提供由每个流水线产生的产品的测量值，以及连接到输入设备和原位过程监控器的控制器。 控制器被编程为接收通过输入设备的期望流量比，从原位过程监控器接收产品测量值，并且基于所需的流量比和产品测量值来计算校正的流量比。 如果产品测量值不相等，则校正后的流量比将不同于所需的流量比。