发明授权
- 专利标题: Ceramic coating deposition
- 专利标题(中): 陶瓷涂层沉积
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申请号: US13043948申请日: 2011-03-09
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公开(公告)号: US08642140B2公开(公告)日: 2014-02-04
- 发明人: Igor V. Belousov , Yuriy G. Kononenko , Anatoly Kuzmichev , Leonid Shaginyan , Michael J. Maloney , John F. Mullooly, Jr.
- 申请人: Igor V. Belousov , Yuriy G. Kononenko , Anatoly Kuzmichev , Leonid Shaginyan , Michael J. Maloney , John F. Mullooly, Jr.
- 申请人地址: US CT Hartford
- 专利权人: United Technologies Corporation
- 当前专利权人: United Technologies Corporation
- 当前专利权人地址: US CT Hartford
- 代理机构: Bachman & LaPointe, P.C.
- 主分类号: H05H1/24
- IPC分类号: H05H1/24
摘要:
A material is applied to a part. The part is placed in a deposition chamber and a first electric potential is applied to the part. Components are evaporated for forming the material. The evaporated components are ionized. The first electric potential is modulated so as to draw the ionized component to the part. The modulation comprises a plurality of first steps for PA-PVD. Each of the first steps comprises a series of pulses of negative potential. The modulation further comprises a plurality of second steps for PVD alternating with the first steps.
公开/授权文献
- US20120231173A1 Ceramic Coating Deposition 公开/授权日:2012-09-13