发明授权
- 专利标题: Measurement systems and methods
- 专利标题(中): 测量系统和方法
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申请号: US13312423申请日: 2011-12-06
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公开(公告)号: US08643849B2公开(公告)日: 2014-02-04
- 发明人: Li Tao , Guiju Song , Xinjun Wan , Kevin George Harding , Steven Robert Hayashi , James Joseph Hoffman , Charles Walter Muekmore , Yana Zhang Williams , Shukuan Xu
- 申请人: Li Tao , Guiju Song , Xinjun Wan , Kevin George Harding , Steven Robert Hayashi , James Joseph Hoffman , Charles Walter Muekmore , Yana Zhang Williams , Shukuan Xu
- 申请人地址: US NY Schenectady
- 专利权人: General Electric Company
- 当前专利权人: General Electric Company
- 当前专利权人地址: US NY Schenectady
- 代理机构: Global Patent Operation
- 代理商 Peter T. DiMauro
- 优先权: CN201010601226 20101210
- 主分类号: G02B11/24
- IPC分类号: G02B11/24
摘要:
A measurement system comprising a light source unit, a projection unit and an optics unit is disclosed. The light source unit is configured to generate a plurality of modulated phase shifted light beams. The projection unit is configured to reflect the modulated phase shifted light beams onto an object surface. The optics unit is configured to capture the modulated phase shifted light beams from the object surface. The measurement system further comprises a photodetector and a processor. The photodetector is configured to receive the modulated phase shifted light beams from the optics unit to generate electrical signals. The processor is configured to retrieve position information of the object surface based on the electrical signals from the photodetector. A measurement method is also presented.
公开/授权文献
- US20120147383A1 MEASUREMENT SYSTEMS AND METHODS 公开/授权日:2012-06-14