发明授权
- 专利标题： Stabilization of silsesquioxane resins
- 专利标题（中）： 倍半硅氧烷树脂的稳定化
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申请号： US13513588申请日： 2010-12-02
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公开(公告)号： US08648125B2公开(公告)日： 2014-02-11
- 发明人: Andrew MacMillan , Eric Scott Moyer , Michael Robert Reiter , Kasumi Takeuchi , Sheng Wang , Craig Rollin Yeakle
- 申请人： Andrew MacMillan , Eric Scott Moyer , Michael Robert Reiter , Kasumi Takeuchi , Sheng Wang , Craig Rollin Yeakle
- 申请人地址： US MI Midland
- 专利权人： Dow Corning Corporation
- 当前专利权人： Dow Corning Corporation
- 当前专利权人地址： US MI Midland
- 代理机构： Dow Corning Corp.
- 代理商 Sharon K. Brady; Claude F. Purchase
- 国际申请： PCT/US2010/058251 WO 20101202
- 国际公布： WO2011/068766 WO 20110609
- 主分类号： C09D183/00
- IPC分类号： C09D183/00 ; C09K3/00
摘要：
Disclosed is silsesquioxane resin composition that contains a free radical curable functional group that is stabilized with a hydrophilic inhibitor. The hydrophilic inhibitor that has the capability to scavenge free radicals such as ascorbic acid or salicylic acid is used to stabilize the resin. The resins are useful in semiconductor formation such as for anti-reflective coatings, hardmasks or photoresist layers.
公开/授权文献
- US20120252920A1 Stabilization Of Silsesquioxane Resins 公开/授权日：2012-10-04
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