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US08648342B2 Waveguide-integrated graphene photodetectors 有权
波导集成石墨烯光电探测器

Waveguide-integrated graphene photodetectors
Abstract:
A photodetector includes a waveguide on a substrate, and a photodetection portion connected to the waveguide. The photodetection portion includes a first semiconductor layer, graphene on the semiconductor layer, and a second semiconductor layer on the graphene. A first electrode and a second electrode separated from the first ridge portion and electrically connected to the graphene.
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