Invention Grant
- Patent Title: Sensor device and method
- Patent Title (中): 传感器装置及方法
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Application No.: US13733375Application Date: 2013-01-03
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Publication No.: US08652866B2Publication Date: 2014-02-18
- Inventor: Klaus Elian , Georg Meyer-Berg , Horst Theuss
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Dicke, Billig & Czaja, PLLC
- Main IPC: H01L21/56
- IPC: H01L21/56 ; H01L23/28

Abstract:
A sensor device and method. One embodiment provides a first semiconductor chip having a sensing region. A porous structure element is attached to the first semiconductor chip. A first region of the porous structure element faces the sensing region of the first semiconductor chip. An encapsulation material partially encapsulates the first semiconductor chip and the porous structure element.
Public/Granted literature
- US20130122660A1 SENSOR DEVICE AND METHOD Public/Granted day:2013-05-16
Information query
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