Invention Grant
US08652866B2 Sensor device and method 有权
传感器装置及方法

Sensor device and method
Abstract:
A sensor device and method. One embodiment provides a first semiconductor chip having a sensing region. A porous structure element is attached to the first semiconductor chip. A first region of the porous structure element faces the sensing region of the first semiconductor chip. An encapsulation material partially encapsulates the first semiconductor chip and the porous structure element.
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